Thin film technologies and production technologies for active microstructured piezoelectric semi-finished parts (A03)

子项目A03的目的是开发一种用于生产微结构压电半成品（互连压电陶瓷粗纤维PSV）的大批量兼容技术。这些部件用作铝金属板部件和注塑成型部件中的有源元件。在第三个资助期内，研究了PSV上电极和a-SiCN：H绝缘膜的沉积。此外，需要提高PSV的生产工艺（即研磨、堆叠、焊接和切割）的稳定性。为了在PSV的生产和集成过程中进行监控，研究了电气和光学在线测量的使用。

Aim of subproject A03 is the development of a high-volume compatible technology for the production of microstructured piezoelectric semi-finished parts (interconnected piezoceramic macro fibers PSV). These parts are used as active elements in aluminum sheet metal parts and injection molded parts. Within the third funding period, the deposition of electrode and a-SiCN:H insulating films on PSV is studied. Further, the stability of the production processes for PSV, namely lapping, stacking, soldering and dicing, needs to be increased. For process monitoring during production and integration of the PSV, the use of electrical and optical online-measurements are investigated.