High Performance Optical Profilometer for mapping micro/meso/macroscopic topography

开发先进、高性能的新材料需要了解表面和界面。在澳大利亚研究界，制造面积小、产量低的材料或设备是经常发生的事情。要创造出可复制的、高产量的材料，需要更好地了解材料在大范围内的应力、均匀性和变形。拟议中的仪器可以测量许多厘米的地形-以亚微米的空间分辨率平方，这目前超出了澳大利亚研究人员的能力。通过提供一种测量表面纹理的定量方法，该仪器还将支持澳大利亚寻求改进工艺控制的行业。

Developing advanced, high performance new materials requires an understanding of surfaces and interfaces. Making a small area, low yield material or device is a regular occurrence within the Australian research community. The ability to create reproducible, high yield materials requires greater understanding of the stresses, uniformities and deformations in a material over large areas. The proposed instrument can measure topography over many centimeters-squared with sub-micron spatial resolution, currently beyond the capabilities of researchers in Australia. By providing a quantitative method to measure surface textures, the instrument will also support Australian industries looking for improved process control.