Random-Phase-Shift-Interferometer

本申请是项目TU-135/15-1的扩展请求，标题为“随机相移干涉仪”。前一个项目的工作已经完成，结果可以在初步报告中进行回顾。随着后续应用的发展，平面随机移相干涉仪的测量能力将进一步提高，以适应球面的测量。这是可能的使用前开发的随机相移算法也测量球面。为此，有必要开发一种新的方法来确定振动影响下球面参考波前与球面测试波前之间的局部随机相对相移。一种基于确定球面镜中心点位移的评估算法的适当方法已经存在，并在初步工作部分进行了更详细的解释。为了验证新的相位确定方法并找到合适的传感器配置，已经开始的测量设置模拟必须继续进行。模拟也应该有助于发现在选择过程中的失败，为光学元件的设置。为了测量球面，必须修改设置。一方面，球面测试面与透射球相结合，形成球面参考波前。另一方面，用于确定随机相移的高时间分辨率检测器必须进行改进和测试。首先，将用新的球面测量装置对已知三个方向空间位移的球面进行比较测量，并分析给定和测量的球面运动之间的偏差。最后，在不隔振的情况下，对已知表面形貌的不同测量对象进行测量。这些测量将在随机振动的影响下进行，例如在生产环境中。测量的目的是确定相对测量不确定度。根据我们目前的知识，目前没有其他机构研究类似的方法来测量振动影响下的球面。

This application is the request for the extension of the project: TU-135/15-1, with the title "Random-Phase-Shift-Interferometer". The work of the former project has been finished and the results can be reviewed in the preliminary report. With the follow-up application, the Random-Phase-Shift-Interferometer for plane surfaces should be enhanced for the measurement of spherical surfaces. It is possible to use the former developed random-phase-shift algorithm also for the measurement of spherical surfaces. For that purpose it is necessary to develope a new method for the determination of the local random relative phase-shift between spherical reference and spherical test wavefront under the influence of vibration. An adequate approach for an evaluation algorithm which is based on the determination of the shift of the centre point of the spherical mirror already exists and is explained more in detail in the section for preliminary work. The already started simulations for the measurement setup to verify the new phase-determination method and to find an appropriate sensor configuration have to be continued. The simulations should also help to find failures during the selection process for the optical components for the setup. To measure spherical surfaces, the setup has to be modified. On the one hand a spherical test surface in combination with a transmission sphere to create the spherical reference wavefront has to be integrated. On the other hand the high temporal resolution detector for the determination of the random phase-shifts has to be modified and tested. At first comparative measurements on spherical surfaces with known shift in all three directions in space will be done with the new setup for the measurement of spherical surfaces, and the deviations between given and measured sphere movement will be analyzed. Finally measurements with different measurement objects of known surface topography on a table without vibration isolation will be made. These measurements will be done under the influence of random vibration, as it appears e.g. in a production environment. The objective of the measurements will be the determination of the relative measurement uncertainty. According to our present knowledge, no other institution currently works on a comparable approach to measure spherical surfaces under the influence of vibration.