Time-resolved microscopy and model-based analysis of Transparent Conductive Oxides thin-film ablation by spatial and temporal shaped ultrashort pulsed laser radiation

在本项目中，将对使用超短脉冲激光辐射应用于ITO（氧化铟锡）的透明导电层的所谓部分和间接诱导激光烧蚀进行基本了解。其结果是一个描述的元模型的形式，这是从模拟和实验数据。通过选择性地使用这种激光诱导烧蚀，导电结构被分离或结构化，从而产生用于诸如发光二极管的前电极的部件的功能表面。由于终端组件通常由层厚度在几十到100纳米范围内的几个薄膜组成，因此被去除的ITO层的边缘区域中的缺陷（例如跳跃）可能导致短路并因此导致组件的故障。为了控制甚至防止这种缺陷，烧蚀过程和所涉及的物理相互作用的透彻理解是必要的，为了识别这些机制，烧蚀过程的驱动力，并指导一个物理物理模型的发展，实验过程的可观测量进行了调查，它描述了动力学和能量的过程。仿真和实验结果用于迭代开发的元模型。元模型是一个计算查找表，用于参数和标准（过程图）之间关系的连续近似。与单个模拟运行或实验的数据分析相比，Metamodel允许使用严格的数学方法对插值的任意密度的数据进行全局分析。在项目结束时，开发的元模型预计将预测可测量和可验证的目标变量，如光栅高度，基板损坏，绝缘电阻和裂纹长度作为工艺参数的函数。

In this project, a basic understanding of the so-called partial and indirectly induced laser ablation of transparent, conductive layers using ultra-short pulsed laser radiation applied to ITO (Indium Tin Oxide) is to be developed. The result is a description in the form of a Metamodel, which is obtained from simulations and experimental data. By selective use of this laser-induced ablation, electrically conductive structures are separated or structured producing functional surfaces for components, such as front electrodes of a light-emitting diode. Since the end components often consist of several thin films with layer thicknesses in the range of a few tens to 100 nanometers, defects such as jumps in the edge area of the ITO layer removed can lead to short circuits and consequently to failure of the component. To manipulate or even prevent such defects, a thorough understanding of the ablation process and the physical interactions involved is necessary.In order to identify these mechanisms, the driving forces of the ablation process and to guide the development of a mathematical-physical model, experimental process observables are investigated, which describes both the dynamics and the energetics of the process. The simulative and experimental results are used for the iterative development of a Metamodel. A Metamodel is a computational look-up table for the continuous approximation of the relation between parameters and criteria (process map). Compared with the analysis of data from single simulation runs or experiments, the Metamodel allows a global analysis using rigorous, mathematical methods on interpolated, arbitrarily dense data. At the end of the project, the developed Metamodel is expected to predict measurable and verifiable target variables such as grating heights, substrate damage, insulation resistances and crack lengths as a function of the process parameters.