Preparation of Oxide Mesocrystal Films and Their Application to Transparent Conducting Films

在本研究中，我们的目标是低温制造的金属氧化物晶体薄膜的锡掺杂氧化铟的替代品，通过一种新的薄膜加工技术，可以实现低环境负荷，高沉积速率，和成本效益。通过控制溶液的流速和旋转台的转速，采用旋转喷雾法成功地制备了可见光透过率大于70%，电阻率约为5 × 10 ~（-3）ohm cm的ZnO薄膜。当水溶性高分子作为添加剂时，柠檬酸三钠以不同方式改变晶体形状。与柠檬酸三钠制备的ZnO薄膜相比，水溶性聚合物制备的ZnO薄膜的性能并没有得到改善。结果表明，吸附的有机物和膜结构强烈影响电性能。

In this research, we aim low-temperature fabrication of metal oxide crystal films for substitution of tin-doped indium oxide by a new film processing technique which can achieve low environmental load, high deposition rate, and cost effectiveness. ZnO films with visible-light transparency over 70 percents and electrical resistivity about 5X10-3 ohm cm were successfully fabricated by spin-spray method with controlling the flow rate of solution and rotation rate of table. When water-soluble polymer was used as an additive, the crystal shape was changed by different manner with trisodium citrate. The performance of ZnO films prepared by using water-soluble polymer was not improved compared with those prepared with trisodium citrate. The results indicated that the adsorbed organics and film structure strongly affected electrical properties.