Development and Application of the Three Dimensional Microscope System for Nano Space Spectroscopy

为了实现亚微米空间分辨率的三维化学分析，研制了一种新型的共聚焦拉曼/荧光显微镜，用于样品级的XY扫描和物镜的Z扫描。基于附加在执行器上的位置传感器的参考信号的闭环操作提供了良好的线性度，长时间稳定性和高精度的样品位移。用物镜收集样品的散射光或发射光，并引导到光谱仪的针孔和狭缝中。用荧光微球和硅光电晶体检测了该系统在XY平面内的性能。石英玻璃上聚集的两个200纳米球体的荧光图像显示，两个球体的顶部都清晰地分辨出来。此外，在500 cm-1的硅波段上收集的光子晶体拉曼图像显示亚微米孔呈三角形排列。如上所述，显微镜系统已经研制成功。

In order to achieve three-dimensional chemical analyses at submicrometer spatial resolution, a new confocal Raman/fluorescent microscope coupled with close loop piezoelectric actuators for XY scanning of a sample stage and Z scanning of an objective has been developed. The closed loop operation based on reference signals from position sensors attached to the actuators provides good linearity, long time stability and high accuracy of sample displacement. Scattered light or emission from the sample is collected using the objective, and guided to a pinhole and a slit of spectrometer. Performance of this system within XY plane was checked using fluorescent microspheres and phototaic crystals made of silicon. A fluorescence image of two 200 nm spheres aggregating on a quartz glass shows that tops of both spheres are clearly resolved. Furthermore, a Raman image of the photonic crystal collected in the 500 cm-1 band of silicon shows the submicormeter holes arranged triangularly.As mentioned above, the microscope system has been developed successfully.