Micro/Nanomachined Device for High-density Data Storage

微机械加工技术使各种微机电系统集成化成为可能。纳米尺度的机械从微米尺度到纳米尺度的微小化使其性能更高，特别是在机械、热、光学等方面。特性.本研究的目的是基于扫描探针显微镜的高密度数据存储器件的制造和评估，具有写入和读取尺寸为25 nm的位的能力，这是通过微/纳米加工技术制造的。在传统的光存储中，聚焦激光束的加热使得能够在盘上写入和读取比特，然而，光的衍射限制了记录密度。为了解决这个问题，本研究将聚焦激光器替换为许多纳米级加热器作为记录头。在本研究中，我们开发了基本的制造技术，并展示了性能和其他相关技术进行了研究。超薄硅梁作为一种高灵敏度的敏感元件的开发和这些机械性能的特点。还开发了可以使用极端局部化光场的近场微组件。

Micromachining technology enables to integrate various kinds of micro-electro-mechahical systems used in wide fields. Nano-scale mechanics that are miniaturized from micro to nano scale make the performance higher, especially in mechanical, thermal, optical. properties. Objects of this research are the fabrication and the evaluation of high-density data storage device based on scanning probe microscopy with an ability to write and read bits with the size of 25 nm, which is fabricated by the micro/nanomachining technology. In conventional optical storage, heating by focused laser beam enable to write and read bits on a disk, however, the diffraction of light limits the recording density. To overcome this problem, the focused laser is replaced with many nano-scaled heater as a recording head in this research. In this research, we developed fundamental fabrication technique and demonstrate the performance and other related techniques were investigated. Ultra-thin silicon beams as a high sensitive sensing element are developed and these mechanical properties are characterized. Near-field micro components which can use an extremely localized light-field are developed as well.