DEVELOPMENT AND APPLICATION OF SOFT X-RAY INTERFEROMETER

干涉测量是现代科学技术中不可缺少的一项技术，在可见光领域得到了相当成功的发展。然而，在波长比可见光短得多的软x射线区域，干涉测量技术尚不发达，利用波动特性进行测量的研究较少。软x射线干涉仪的研制将开辟多种应用领域。然而，软x射线波长短、光学元件质量差等问题阻碍了软x射线干涉测量技术的发展。我们有建造和操作硬x射线干涉仪的经验，其波长比软x射线更短。我们提出这个研究项目是为了将我们的活动扩展到软x射线领域。在硬x射线区域，晶体光学元件是可用的，因此干涉仪可以在硬x射线波长（约0.1 nm）的情况下工作。虽然指出了软x射线的特点，如没有晶体，干涉仪必须在真空中建造，但我们认为，基于我们在硬x射线领域的成就，软x射线干涉仪的发展是可以在我们的范围内的。我们采用独立Ru/SiN薄膜作为分束器，构建了用于13nm同步软x射线的Mach-Zehnder干涉仪。我们之所以选择这种配置，是因为它的操作相对简单，并且期望有各种应用程序。我们发现，为了对准四个光学元件，只需要两个精确的调谐阶段，并制作了一个由压电致动器驱动的精确请愿器的原型。此外，由于对准计划很重要，我们设计了一种依赖于可见激光可见性的方法。使用软x射线的实验在高能加速器研究组织的光子工厂进行。不幸的是，我们还没有观察到干扰。我们认为振动和/或光学元件的变形是造成当前结果的原因。我们将继续试验，设法解决这些问题。一旦观测到干涉，我们计划增加一种改变光程长度的机制，并继续发展软x射线傅立叶干涉测量，以实现软x射线光谱学领域的创新能量分辨率。少

Interferometry, which is indispensable in modem science and technology, has been quite successfully developed in the visible light region. In the region of soft X-rays whose wavelength is much shorter than that of visible light, however, interferometry is underdeveloped, and few researches into the metrology taking advantage of wave nature are reported. It is dear that a variety of applications would be opened up when a soft X-ray interferometer is developed. However, the short wavelength of soft X-rays and poor quality of optical elements for soft X-rays have obstructed the development of soft X-ray interferometry. We have experience of constructing and operating interferometers for hard X-rays whose wavelength is further shorter than that of soft X-rays. We proposed this research project as an expansion of our activity into the soft X-ray region. In the hard X-ray region, crystal optical elements are available, and therefore interferometers were operated in spite of the hard-X-ray wa … More velength (ca. 0.1 nm). Although problems characteristic of soft X-rays, such as that crystals are not available, and that an interferometer has to be constructed in vacuum, are pointed out, we consider that the development of a soft X-ray interferometer can be within our scope basing on our achievement in the hard X-ray region.We constructed a Mach-Zehnder type interferometer for 13-nm synchrotron soft X-rays employing free-standing Ru/SiN films for beam splitters. We selected this configuration because its operation is comparatively easy and a variety of applications are expected. We found that only two accurate tuning stages are required in order to align four optical elements, and fabricated a prototype comprising accurate petitioners driven by piezoelectric actuators. Furthermore, because the plan for alignment is important, we devised a method that depends on the visibility of visible laser.Experiments using soft X-rays were canned out at the Photon Factory, High Energy Accelerator Research Organization. Unfortunately, we have not observed interference yet. We consider that vibration and/or deformation of optical elements would be responsible for current results. We will continue experiments, devising to get rid of the problems. Once interference is observed, we have a plan to add a mechanism for changing optical path lengths and to move on the development of soft X-ray Fourier interferometry to realize innovative energy resolution in the field of soft X-ray spectroscopy. Less