顕微干渉縞の画像追尾によるマイクロ物体の三次元挙動測定装置の開発に関する研究

建立了一种测量具有光学反射表面的微物体三维姿态的新方法，该方法利用迈克尔逊干涉法在运行表面和微物体表面形成的两条条纹之间的相位差。该方法成功地应用于测量头部与磁盘之间的间距，而头部在玻璃磁盘上飞行时彼此相距纳米。研制了一种具有高放大倍率的干涉光学系统和具有高分辨率的图像捕获系统。然后，建立了一种消除分层滑块表面多束干涉引起的相移的校正程序。最后，实验结果表明，该方法适用于实际应用。本文的研究结果可以总结如下。1)采用高倍率的显微镜型迈克尔逊干涉仪和采用高视觉CCD相机的图像采集系统，获得了0.192 m×O的高空间分辨率。2)将多光束干涉应用于磁盘-滑块界面的分层表面模型，计算了滑块表面反射引起的相移。利用计算得到的相位延迟，建立了由观测到的间距得到机械间距的修正程序。3)利用实际使用的纳米滑块进行实验测量，并将测量结果与计算结果进行对比。结果表明，该方法可以作为一种新的飞行高度测量替代方法。

A novel method to measure three-dimensional attitude of a micro-object having an optical reflective surface has been established, in which the phase difference between two fringe patterns formed over a running surface and the micro-object's surface by Michelson interferometry was utilized. This method was successfully applied to measuring head-to-disk spacing while a head flying over a glass disk separated each other by nanometers. An interference optical system having high magnification and an image capture system having high resolution were developed. Then, a correction procedure to eliminate the phase shift caused by the multiple beam interference on the stratified slider surface was established. Finally, experimental results indicated that the present method was applicable to practical usage. The results of the present work can be summarized as follows. 1) A microscope-type Michelson interferometer with a high magnification power and an image capture system using a high-vision CCD camera achieved a high spatial resolution of 0.192 m×O.383 m, and external identification of the fringe interval by driving the reference mirror for half a wavelength allowed a high spacing resolution of 0.83 nm. 2) By applying multiple beam interference to the stratified surface model of the disk-slider interface, the phase shift caused by the reflection on the slider surface was calculated. Using the calculated phase delay, a correction procedure to obtain the mechanical spacing from the observed spacing was established. 3) Experimental measurements were performed using the nano-sized slider in practical use, and the measurement results were compared with the calculated results. Both results were found to be in good agreement with each other, which indicates that the present method is applicable as a new alternative method for flying height measurement.