Developmet of Wide Range Tribo-Tester Using Scanning Probe Technique

为了用扫描探针法评价表面的摩擦学特性，对探头施加的作用力范围大，测量的垂直和水平作用力分开清楚，尖端具有较高的抗滑动运动的耐久性是必不可少的。为此，选择了一种粘贴有钻石尖端的悬臂梁。首先，提出了一种具有分别测量垂向力和水平力的新型悬臂结构。这种结构的特点是从底座杠杆延伸出来的两个杠杆，并与具有钻石尖端的顶部横向杆桥接。这种结构允许利用来自双杠杆的差动信号和来自基杆的直接信号来分别测量扭转和垂直位移。其次，应用迈克尔逊激光干涉法测量悬臂的三维位移。利用超高速录像机采集了悬臂梁表面形成的条纹图案，并对图像数据进行了分析，同时提供了垂直和水平的力，最后制作了掺杂N型原子的硅悬臂梁，用于直接测量悬臂梁应变产生的力。通过实验阐明了悬臂梁的线性度和灵敏度，并利用悬臂梁的共振特性识别了悬臂梁的力学特性，如刚度和有效质量。

To evaluate tribological characteristics of surface using the scanning probe method, wide range of applying forces to the probe, clear separation in measured vertical and horizontal forces and high durability of tip against sliding motion are essential. For this purpose, a cantilever with a diamond tip glued onto it was selected.First, a novel cantilever structure having a function for measuring vertical and horizontal forces separately was proposed. Special feature of this structure was twin levers extended from a base lever and bridged with a top lateral bar having a diamond tip. This structure was confirmed to permit torsional and vertical displacements to be measured separately using differential signal from the twin levers and direct signal form the base lever.Second, the Michelson laser interferometry was applied for measuring three-dimensional displacement of the cantilever. Fringe pattern formed over the cantilever surface was captured using a ultra-high speed VTR,then the image data were analyzed to provide vertical and horizontal forces, simultaneously.Finally, a silicon cantilever doped with N-type atoms was fabricated for directly measuring the force from the cantilever strain. Linearity and sensitivity were experimentally clarified, and mechanical characteristics, such as, stiffness and effective mass were identified using resonance of the cantilever.