Multi-dimensional Nano Control of Plasma Flow Systems by Using Fusion

“等离子体流集成系统”是将等离子体流与微/纳米粒子、自由基和复杂相互作用的界面结合起来，并与传感器和控制器集成在一起，成功构建的。本研究的结果如下：(1)明确了DC-RF混合等离子体流系统进口流量比、旋流、注气位置对稳定等离子体生成所需输入功率和注入反应物气体流量的影响。进一步阐明了操作压力对飞行特性和流动结构的影响，为多维控制提供了重要依据。(2)基于统计优化的光催化纳米颗粒合成DC-RF混合等离子体流系统，可通过入口气体流量比和淬火气体流量控制纳米颗粒的粒径分布和晶体结构。(3)为稳定冲击基板进行氮化处理的氩/氮等离子体射流，开发了多维智能控制系统。通过操作背压和外加磁场实现了基片附近辐射强度的恒定控制和等离子体射流波动的抑制。(4)数值阐明了种子、施加频率和湍流特性对微颗粒相变和粒径减小的影响，以控制种子钾蒸汽ICP对颗粒的处理。(5)通过实际的纳米颗粒合成模型，数值分析了淬火气体流速、施加频率和直流射流添加量对ICP纳米颗粒尺寸分布的影响。

‘Plasma Flow Integrated System' is successfully constructed by combining plasma flow with micor/nano particles, radicals and interface with complex interactions and further by integrating with senser and controller. The results obtained in the present study are as follows.(1)The effects of inlet flow rate ratios, swirling flow, gas injection location on needed input power for stable plasma generation and injected reactant gas flow rate are clarified for DC-RF hybrid plasma flow system. Furthermore, the effect of operating pressure on the in-flight characteristics and flow structure is clarified to provide the important element for multi-dimensional control.(2)Based on the statistically optimized DC-RF hybrid plasma flow system for photo-catalytic nano particle synthesis, particle size distribution and crystal structure can be controlled by inlet gas flow rate ratio and quench gas flow rate.(3)Multi-dimensional intelligent control system is developed to stabilize the argon/nitrogen plasma jet impinging onto the substrate for nitridation. Constant control of radiation intensity near substrate and suppression of plasma jet fluctuation are realized by operating back pressure and applied magnetic field.(4)The effects of seeding, applied frequency and trubulent characteristics on phase change and diameter decrease of micro particles are numerically clarified to control particle treatment by ICP with seeding potassium vapor.(5)The effects of quench gas flow rate, applied frequency and DC jet addition on nano particle size distribution for ICP are numerically clarified by realistic nano-particle synthesis model.