300kV Cs-corrected transmission electron microscope

所要求的单色电子束扫描电子显微镜(STEM)是一种分辨率最高的显微镜。基于校正的球差，亚原子分辨率的结构和分析研究是可行的，该仪器将主要用于基于固体的基础研究领域。各种探测器(ABF、HAADF、DPC等)对于明场和暗场成像，STEM模式允许在原子尺度上确定元素组成、晶体结构的细节(4DSTEM)以及电场。通过EDX和EELS(连同低剂量选择)，设想对化学元素、其结合状态和电子结构以及复杂材料和(敏感)纳米结构中的电子激发进行详细和可靠的研究，这些在理工大开姆尼茨大学的工程和自然科学中发挥核心作用。仪器配置在以下方面进行了优化：集成分析系统(EDX、EELS)的最高分辨率、最佳检测灵敏度、敏感样品的工作可能性以及扫描样品区域时的复杂数据采集(4DSTEM)。

The requested scanning transmission electron microscope (STEM) with a monochromatized electron beam is a microscope with highest resolution. Based on the corrected spherical aberration, structural and analytical investigations with subatomic resolution are feasible and the instrument will be used mainly in the area of solid state-based fundamental research. Various detectors (ABF, HAADF, DPC, etc.) for bright and dark field imaging allow within the STEM mode the determination of the elemental composition, details of the crystal structure (4DSTEM) as well as electric fields on the atomic scale. By means of EDX and EELS (together with a low-dose option), detailed and reliable studies of the chemical elements, their binding states and the electronic structure as well as electronic excitations in complex materials and (sensitive) nanostructures, which play a central role in engineering and natural sciences at the TU Chemnitz, are envisaged. The instrument configuration is optimized with regard to highest resolution, best possible detection sensitivity of the integrated analysis systems (EDX, EELS), the working possibilities with sensitive samples as well as the complex data acquisition when scanning over sample areas (4DSTEM).