MOLECULAR THERMAL ENGINEERING RESEARCH ON CONDENSATION

为了了解气体原子和分子的聚类和成膜缩聚的分子机理，寻找细颗粒和薄膜加工的控制技术，本文从理论和实验两方面对以下课题进行了研究：(1)团簇形成和薄膜凝聚的分子机理；(2)热CVD过程中膜厚度、组成和晶体结构的控制；(3)金属原子薄膜凝聚的基本过程；(4)团簇和薄膜形成过程中的微尺度传热；(5)相变分子动力学理论；(6)团簇形成的分子动力学；(7)激光烧蚀过程中的原子和分子行为；(8)气体反应中细颗粒的形成和生长过程；(9)液体分子凝结和蒸发的分子动力学机理；（10）小温度梯度对CVD过程的影响。主要研究结果包括：团簇大小与成膜速率之间的关系、热CVD与表面反应的成膜机理、高速旋转热CVD均匀快速成膜的证据、凝聚金属原子的平动能对成膜的影响、用缓速电场法检测金属原子膨胀束中团簇的形成。用激波管法测量甲醇蒸气的冷凝系数，通过测量薄膜厚度和温度的变化，水分子簇和氢键形成的分子动力学过程，通过激光诱导荧光原位观察高温超导薄膜激光烧蚀过程中的原子和分子行为，气体反应中形成的细颗粒的烧结和生长特性。液体脱水和蒸发的分子动力学机制，以及小温度梯度通过形成自由基对CVD过程的影响。少

With the aim of understanding the molecular mechanism of clustering and film condensation of gaseous atoms and molecules and of finding the controlling techniques for fine-particle and thin-film processing, the following subjects have been studied theoretically and experimentally ; (1) Molecular mechanism of cluster formation and film condensation, (2) Control of film thickness, composition and crystal structure of thermal CVD process, (3) Fundamental processes of thin film condensation of metal atoms, (4) Micro-scale heat transfer in formation processes of clusters and thin films, (5) Molecular kinetic theory of phase change, (6) Molecular dynamics of cluster formation, (7) Atomic and molecular behavior in laser ablation, (8) Formation and growth processes of fine particles in gaseous reaction, (9) Molecular dynamics mechanism of condensation and evaporation of liquid molecules, (10) Effects of small temperature gradient on CVD process. The major results yield the relationships betwee … More n the cluster size the film condensation rate, film condensation mechanism of thermal CVD with surface reactions, evidence of uniform and rapid film formation by high-speed rotating thermal CVD,effects of translational energy of condensing metallic atoms on film condensation, detection of cluster formation in expansion beams of metallic atoms by a retarding electric field method, condensation coefficients of methanol vapor with the shock-tube method by measuring the film thickness and temperature change, molecular dynamics processes of cluster and hydrogen-bond formation of water molecules, atomic and molecular behavior in the process of laser ablation of high-temperature super-conducting thin film through in-situ observation using laser-induced fluorescence, sintering and growth characteristics of fine particles formed in gaseous reactions, molecular dynamics mechanism of condemsation and evaporation of liquids, and effects of small temperature gradient on CVD process through formed radicals. Less