DEVELOPMENT OF AEROSTATIC GUIDE WITH HIGH STIFFNESS AND HIGH PERFORMANCE MADE OF PARTIALLY POROUS FINE CERAMICS

虽然摩擦和磨损在空气静压导轨中都很小，但刚度相对较小。多孔材料被用作节流器以提高空气静压导轨的刚度。本研究将采用特殊工艺制备的部分多孔陶瓷材料应用于空气静压导轨中。陶瓷的多孔部分和细部之间的边界是无缝的，孔隙率和孔径能够灵活控制。对部分多孔陶瓷制成的空气静压导轨的基本静态特性进行了评价。此外，为了获得较高的静刚度，对多孔陶瓷表面进行了化学镀处理，并考察了镀层对静刚度的影响。此外，加压空气还会使陶瓷发生偏转。分析了多孔陶瓷挠度对其静态特性的影响。得到的结果如下：1。即使在非镀陶瓷的情况下，最大无因次静刚度也足以用于空气静压导轨。在镀陶瓷的情况下，流速和间隙都减小了。因此，通过电镀获得了较高的刚度。2.获得最大无因次静刚度的最小间隙随多孔陶瓷挠度变化不大。因此，最小间隙适合作为代表性间隙。3.最大无因次静刚度和最小间隙估计的承载能力由于多孔陶瓷的偏转而降低。4.最大无量纲静刚度和承载能力可按挠度与视间隙之比排序。5.本研究中所采用的部分多孔陶瓷可以应用于空气静压导轨。

While both friction and wear are small in an aerostatic guide, the stiffness is comparatively small. Porous materials are used as a restrictor to improve stiffness in an aerostatic guide. In this study a partially porous ceramics, which was made with a special manufacturing process, was applied to the aerostatic guide. The boundary between the porous part and the fine part of the ceramics was seamless, and the porosity and the pore size were able to be controlled flexibly. The fundamental static characteristics of the aerostatic guide made of the partially porous ceramics were evaluated. In addition electroless plating was treated onto the porous ceramics surface for the purpose of obtaining high static stiffness, and the effect of plating on the static stiffness was examined. In addition the deflection of ceramics would occur by the pressurized air. The influence of deflection of porous ceramics on static characteristics was also evaluated. The obtained results were as follows : 1.Even in case of the non-plated ceramics, the maximum dimensionless static stiffness was enough to be used for the aerostatic guide. In case of the plated ceramics both the flow rate and the clearance decreased. Consequently, the high stiffness was obtained by the plating. 2.The minimum clearance where the maximum dimensionless static stiffness was obtained varied little with the deflection of porous ceramics. Therefore, the minimum clearance was suitable as the representative clearance. 3.The maximum dimensionless static stiffness and the load capacity estimated with the minimum clearance were decreased by the deflection of the porous ceramics. 4.The maximum dimensionless static stiffness and the load capacity could be arranged in order with the ratio of the deflection to the apparent clearance. 5.The partially porous ceramics employed in this study would be able to be applied to aerostatic guides.