Visualization and Measurement on Nano Particle Multiphase Flow using Process Tomography

2004年在船桥校区微设备中心用各种MEMS器件进行了微通道的实验研究。主要内容有：1)微过程层析成像的灵敏度图计算；2)微PT的高精度反问题分析技术，更准确地说，(1)讨论了掩模对准器和电感耦合等离子体刻蚀设备的配方(条件)；(2)制作了微通道的电极，掌握了微通道制作的技术诀窍，并利用MEMS技术，利用溅射技术制作了微电极。此外，本文还介绍了微通道的制作方法(3)对流阻抗进行了测量，并将纳米颗粒流体的测量结果与测量到的纳米颗粒与电极在微通道内的阻抗关系进行了图像重构，实现了微通道内纳米颗粒浓度分布的可视化和测量。

The micro channels were manufactured experimentally with various MEMS devices at Micro Device Center in Funabashi Campus in 2004.The developed things are : 1) a sensitivity map calculation for micro Process Tomography and 2) a cord of highly precise inverse problem analytical technique for micro PT in "software development of micro PT"More precisely, (1) a recipe (a condition) of mask aligner and ICP etching device was discussed.In addition, (2) an electrode placement to micro channel was produced and I mastered the know-how of micro-channel production and made a micro-electrode by MEMS technology with using sputtering.Furthermore, (3) a measurement of flow impedance was performed and I applied an image reconfiguration cord with the results of a nano particle fluid and measured relations of a nano-particle and impedance in the micro-channel with electrode.The visualization and measurement of nano-particle concentration distribution in micro-channel was performed.