scanning electron microscope with energy dispersive X-ray spectroscopy

拟议的主要研究仪器，即具有能量色散X射线光谱学的扫描电子显微镜，将能够分析经等离子体处理或等离子体沉积的材料的形态和元素组成。该仪器具有快速的样品交换和简单的操作，明确的目的是在这里允许日常材料分析和来自博士生的材料分析，而不需要接受高级培训。扫描电子显微镜的常规任务将是分析材料表面形貌及其经等离子体处理后的变化，确定纳米和微米颗粒的尺寸，或测量材料或衬底上纳米颗粒层的厚度。X射线能谱元素分析将用于测量催化剂(金属氧化物)或二维材料(过渡金属二卤化物晶体)的材料组成以及等离子体处理(氮化或掺杂)的结果。

The proposed major research instrumentation, the scanning electron microscope with energy-dispersive X-ray spectroscopy, will allow the analysis of morphology and elemental composition of plasma-treated or plasma-deposited materials. Device with fast sample exchange and easy operation is explicitly aimed for here to allow material analysis on the daily basis and from PhD candidates without an advanced level training. The routine tasks with the scanning electron microscope will be the analysis of the material surface morphology and its changes after plasma treatment, the determination of size of nano- and microparticles, or the measurements of thickens of material or nanoparticle layers on the substrate. The elemental composition analysis with energy-dispersive X-ray spectroscopy will be used to measure material composition of catalysts (metal oxides) or 2D materials (transition metal dichalcogenide crystals) and the results of the plasma treatment (nitridation or doping).