Research on Nano-meter order Assembly System

1.集中运动机械手的实现：结合微小物体搬运任务，明确了机械手执行微小物体搬运所需的功能。提出了一种适用于小物体搬运的“集中运动机械手”的设计思想，并设计和实现了一种基于该思想的新型操作系统。机械手具有7个D.F.F.具有纳米级的定位精度操作系统的主要特点是将机械手的运动集中到显微镜的视场中心，以确保任务的执行与视觉监控。2.立体扫描电子显微镜的实现：实现了立体扫描电子显微镜，实现了纳米尺度世界的三维图像可视化。在所实现的扫描电镜中，通过控制电子显微镜，可以获得立体图像（左眼图像和右眼图像）以及多分辨率图像（局部高放大率图像和全局宽视场图像）。 ...更多信息 罗恩梁在视频速率。3.通过机器人的操作理解功能来防止致命的伤害：在微观任务执行中，操作员经常会错误地破坏物体，因为物体比我们宏观世界中的物体小得多，也弱得多。为了科普这个问题，我们实现了基于机器人对操作员行为的理解的致命伤害预防功能。该功能通过以下步骤实现：a）识别操作者意图，B）预测任务状态，c）在预测到危险的情况下，向操作者发出警告并引导其逃离致命伤害。4.纳米世界任务执行的真实显示：力传感器连接到机械手和工作台的尖端，用于产生声学声音，让操作者知道发生了什么在执行任务的世界里。5.纳米级精度的装配实验：将上述开发的系统组件（集中运动操纵器、纳米级任务执行的逼真显示、计算机辅助致命损伤预防）集成在一起，最终实现了纳米级精度的任务执行系统。这种微任务的执行，组装的微机器，以及微图案的修复成功地执行，以探测的正确性，开发的组件。除了微型空气涡轮机（直径502微米）、微型鸟居（高度100微米）、微型五层寺庙塔（高度230微米）、微型kokeshi（直径200微米的日本娃娃）的弯曲和微型飞机（从1毫米正方形铝箔）的折叠等微型机器组装任务之外，还完成了微型机器组装任务。少

1.Realization of concentrated motion manipulator : Taking account of micro object handling tasks, we make clear the necessary functions of a manipulator to execute micro object handling. A new design concept of "concentrated motion manipulator" suitable for small object handling is proposed and a new manipulation system besed on the concept is designed and realized. The manipulator has 7 D.F.F.'s with nano-meter order positional accuracy. The main feature of the manipulation system is that motion of the manipulator is concentrated to the center of the field of view of a microscope to ensure task execution with visual monitoring.2.Realization of stereo-scopic SEM (Scanning Electron Microscope) : A stereo SEM is realized to visualize 3D-image of the nano-meter scale world. In the realized SEM, a stereo image (left eye image and right eye image) as well as multi-resolutonal images (local high magnification image and global wide field of view image) can be obtained by controlling the elect … More ron beam in video rate.3.Prevention of fatal damage by means of operation understanding function by robot : In micro task execution, the operator frequently breaks the object by mistake, becouse the object is much more smaller and weaker than the object in our macro world. To cope with this problem, we realized the fatal damage prevention function based on the robot understanding of operator behavior. This function is realized by the following steps : a)recognition ofan operator's intension, b)prediction of the task status, c)warning to the operator and guidance to escape from the fatal damage in case of dangerous prediction.4.Realistic display of nano-meter world task execution : Force sensor attached to the tip of the manipulator hand and work table is utilized to generated the acoustic sound to let the operator know what is going on in the task execution world. This display enables the operator to recognize the status of the task execution which is quite different from that of our macro world.5.Assembly experiment of nano-meter accuracy : Developed system components stated above (concentrated motion manipulatoe, realistic display of nano-meter world task execution, computer aided fatal damage prevention) are finally integrated to realize nano-mater accuracy task execution system. Such micro task execution of assembly of micro machines as well as the repair of micro patterns are successfully performed to probe the correctness of the developed components. Other than such micro machine assembly task of a micro air-turbine(502 micron diameter), a micro-Torii(100 micron hight), micro five storied temple tower(230 micron hight), curving of micro kokeshi(200 micron diameter Japanese doll) and folding of micro airplane (from 1 mm square aluminum foil) are also completed. Less