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Construction of nano manufacturing world

构建纳米制造世界

基本信息

批准号：
05402036
负责人：
HATAMURA Yotaro
金额：
$ 17.22万
依托单位：
The University of Tokyo
依托单位国家：
日本
项目类别：
Grant-in-Aid for General Scientific Research (A)
财政年份：
1993
资助国家：
日本
起止时间：
1993 至 1995
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-05402036/
关键词：
Micro manufacturing Micro machine Micro assembly FAB Ultraviolet laser Vibration cutting Total processing and SEM 紫外線レーザ

项目摘要

Recently, Progress of engineering leads to manufacture semiconductors and magnetic heads precisely on the order of 0.1 mum, while progress of physics does to operate an atom on the order of 1 angstrom. Though an inbetween region on the order of 1-100nm needs to be manufactured or operated actively, it is still observed passively.The research has an approach where the human enters the region ; he moves into the small area, observes, touches, removes and measure it. To satisfy the requirement of engineers, wer constructed a table-sized factory, a "nano manufacturing world". It has mechanism elements : 1) micro tools for cutting, assembling and measuring, 2) FAB (Fast Atom Beam) to etch a structure on the order of 1 nm, 3) nano manipulators with 16 degrees of freedoms of motions, 4) SEM (Scanning Electron Microscope) to observe in multi-direction, 5) remote operating system to enter the micro world and 6) software to transform physical parameters between the human world and the micro world. Concretely, the elements are synthesized to vacuum chambers : FAB room, SEM and loadlocked. Micro-parts are fixtured on a pallet, which is transferred by a fobot between the rooms, and are operated by the human in observing with SEMs.From the evaluations to manufacture a suspension of recording head, a micro lens array, a micro dotted memory and a quantum element, we confirmed the effectiveness of the sytems.

最近，工程学的进步使得半导体和磁头的制造精度达到了0.1微米的量级，而物理学的进步则使得原子的运行精度达到了1埃的量级。尽管需要主动制造或操作1-100nm量级的中间区域，但仍然被动地观察到该区域。该研究采用了人类进入该区域的方法；他走进这个小区域，观察、触摸、移除并测量它。为了满足工程师的需求，我们建造了一个桌子大小的工厂，一个“纳米制造世界”。它具有机械元件：1）用于切割、组装和测量的微型工具，2）蚀刻1纳米量级结构的FAB（快原子束），3）具有16个运动自由度的纳米机械手，4）多方向观察的SEM（扫描电子显微镜），5）进入微观世界的远程操作系统以及6）在人类世界和微观世界之间转换物理参数的软件。具体来说，元件在真空室中合成：FAB室、SEM和真空室。微型零件被固定在托盘上，由机器人在房间之间传送，并由人操作，用扫描电镜观察。通过对记录头悬架、微透镜阵列、微点存储器和量子元件的制造进行评估，我们证实了系统的有效性。