Developmet of Wide Range Tribo-Tester Using Scanning Probe Technique

为了使用扫描探针法评估表面的摩擦学特性，对探针施加的力的范围宽、测量的垂直力和水平力的清晰分离以及尖端对滑动运动的高耐久性是必不可少的。首先，提出了一种新型的悬臂梁结构，该结构具有分别测量垂直力和水平力的功能。这种结构的特点是双杠杆从一个基础杠杆延伸，并与一个顶部横向杆有一个钻石尖桥接。实验结果表明，该结构可以利用双杠杆的差分信号和基杠杆的直接信号分别测量悬臂梁的扭转位移和垂直位移。其次，采用迈克尔逊激光干涉法测量悬臂梁的三维位移。利用超高速录像机拍摄悬臂梁表面的条纹图，并对图像数据进行分析，同时获得垂直和水平方向的力，最后制作了一个N型掺杂硅悬臂梁，直接测量悬臂梁应变产生的力。线性度和灵敏度进行了实验澄清，和机械特性，如刚度和有效质量进行了鉴定，使用谐振的悬臂梁。

To evaluate tribological characteristics of surface using the scanning probe method, wide range of applying forces to the probe, clear separation in measured vertical and horizontal forces and high durability of tip against sliding motion are essential. For this purpose, a cantilever with a diamond tip glued onto it was selected.First, a novel cantilever structure having a function for measuring vertical and horizontal forces separately was proposed. Special feature of this structure was twin levers extended from a base lever and bridged with a top lateral bar having a diamond tip. This structure was confirmed to permit torsional and vertical displacements to be measured separately using differential signal from the twin levers and direct signal form the base lever.Second, the Michelson laser interferometry was applied for measuring three-dimensional displacement of the cantilever. Fringe pattern formed over the cantilever surface was captured using a ultra-high speed VTR,then the image data were analyzed to provide vertical and horizontal forces, simultaneously.Finally, a silicon cantilever doped with N-type atoms was fabricated for directly measuring the force from the cantilever strain. Linearity and sensitivity were experimentally clarified, and mechanical characteristics, such as, stiffness and effective mass were identified using resonance of the cantilever.