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顕微干渉縞の画像追尾によるマイクロ物体の三次元挙動測定装置の開発に関する研究

利用微观干涉条纹图像跟踪的微观物体三维行为测量装置研制研究

基本信息

批准号：
13555116
负责人：
MITSUYA Yasunaga
金额：
$ 4.42万
依托单位：
Nagoya University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2001
资助国家：
日本
起止时间：
2001 至 2002
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-13555116/
关键词：
Michelson Interferometry Microscopic Interference Stratified Film Interference Fringe Image Measurement Head Flying Height Image Processing Flying Head Magnetic Disk ヘッド浮上姿勢計測

项目摘要

A novel method to measure three-dimensional attitude of a micro-object having an optical reflective surface has been established, in which the phase difference between two fringe patterns formed over a running surface and the micro-object's surface by Michelson interferometry was utilized. This method was successfully applied to measuring head-to-disk spacing while a head flying over a glass disk separated each other by nanometers. An interference optical system having high magnification and an image capture system having high resolution were developed. Then, a correction procedure to eliminate the phase shift caused by the multiple beam interference on the stratified slider surface was established. Finally, experimental results indicated that the present method was applicable to practical usage. The results of the present work can be summarized as follows. 1) A microscope-type Michelson interferometer with a high magnification power and an image capture system using a high-vision CCD camera achieved a high spatial resolution of 0.192 m×O.383 m, and external identification of the fringe interval by driving the reference mirror for half a wavelength allowed a high spacing resolution of 0.83 nm. 2) By applying multiple beam interference to the stratified surface model of the disk-slider interface, the phase shift caused by the reflection on the slider surface was calculated. Using the calculated phase delay, a correction procedure to obtain the mechanical spacing from the observed spacing was established. 3) Experimental measurements were performed using the nano-sized slider in practical use, and the measurement results were compared with the calculated results. Both results were found to be in good agreement with each other, which indicates that the present method is applicable as a new alternative method for flying height measurement.

提出了一种利用迈克尔逊干涉法在运动表面和微物体表面上形成的条纹相位差测量微物体三维姿态的新方法。这种方法被成功地应用于测量头到磁盘的间距，而一个头飞行在玻璃磁盘上彼此分开纳米。开发了具有高放大率的干涉光学系统和具有高分辨率的图像捕获系统。然后，建立了消除分层滑块表面多光束干涉引起的相移的校正方法。实验结果表明，该方法具有一定的实用价值.本工作的结果可归纳如下。1)利用高倍率的显微镜型迈克尔逊干涉仪和使用高分辨率CCD摄像机的图像捕获系统实现了0.192 m× 0.383 m的高空间分辨率，通过驱动参考镜半个波长来外部识别条纹间隔，实现了0.83 nm的高间隔分辨率。2)通过将多光束干涉应用于磁盘-滑块界面的分层表面模型，计算了滑块表面反射引起的相移。利用计算得到的相位延迟，建立了从观测间距得到机械间距的修正方法。3)利用实际应用中的纳米级滑块进行了实验测量，并将测量结果与计算结果进行了比较。结果表明，该方法可以作为一种新的飞行高度测量方法。