Development of cluster/ultra-fine-particle analyzer by deflection mass spectroscopy

为了研究纳米粒子的产生机制，开发了一种使用偏转质谱的团簇/超细粒子分析仪。以激光研磨铜杆产生的超细颗粒为样品。扫描电镜观察到样品颗粒大小为2 ~ 20 nm。所开发的分析仪可以测量大于5 nm的颗粒，并且发现50%（重量）的样品颗粒是聚集的4片5 nm的初级颗粒。激光脉冲方式对激光磨粒形貌有影响。

In order to investigate a mechanism of nanometer particle generation, a cluster/ultra-fine-particle analyzer by using deflection mass spectroscopy was developed. The ultra fine particles generating from copper rod by laser abrasion was used as samples. The sample particles were observed by scanning electron microscopy and there were distributed from 2nm to 20 nm. The developed analyzer could be measured more than 5 nm particles and it was found that 50 % (weight) of sample particles were aggregated 4 pieces of 5 nm primary particle. The shapes of particles generating from laser abrasion were affected by laser pulse mode.