Development of an Evaluation System for Three-Dimensional Surface Asperity on Precision Cylindrical Parts

本研究系开发一套三维圆柱表面微凸体之评估系统。该系统可以连续测量从形状误差到波纹度或粗糙度。该设备设计用于测量直径为2 ~ 100 mm的圆柱形试样，测量长度为轴向100 mm，由空气静压滚动轴承和空气静压滑动轴承组成。这样就可以在柱坐标系下精确地得到面形偏差。该系统由微机自动控制。该系统的精度小于0.1 μ m的所有测量范围。并采用反向法和多步法检测出该装置的系统误差，然后通过软件将这些微小的残余误差（误差向量）从测量数据中剔除，并利用该系统对滚动轴承滚子进行了测量。首先测量圆柱形总误差。其次，对局部面形进行了精细测量。第三，在更细微的测量条件下测量更细微的区域，以此类推，我们可以找到圆柱体的形状，就像蚂蚁看到的风景一样。在操作员希望的任何条件下，该过程都是可重复的。优点是所有这些测量数据都能够相互关联。以圆柱形宏轴为例，可以对局部面形数据进行回归，结果表明，该系统可以得到100 mm以上的任意尺寸的表面形貌，温度条件严格。因此，必须将该系统设置在温度控制条件下，或者开发新的传感器，用于高速测量，并具有精确的精度。

This research is a development of an evaluation system for three-dimensional surface asperity on cylindrical surface. The system can measure from form error to waviness or roughness continuously. The equipment is designed to be able to measure cylindrical specimen size from 2 to 100mm in diameter and measuring length is 100mm in axial direction.The equipment consists of aero-static rolling bearing and aero-static sliding bearing. Then we can get surface form deviation in cylindrical coordinate precisely. This system is controled automatically by micro-computer. An accuracy of this system is less than 0.1mum over all of measuring range. Moreover the systematic error of this equipment is detected by reversal method and multi-step method, then these minute remained error, error vector, is able to eliminate from measured data by software.Roller used for rolling bearing is measured by this system. Firstly a total cylindrical form error is measured. Secondly partial areal surface form is measured finely. Thirdly more detailed area is measured more minute measuring condition, and so on. By this procedure, we can find out the cylinder form as if the landscape of an ant view. This procedure is repeatable in any condition that operator want. The advantage is that all of these measured data is able to relate each other. Then for example local areal data can be regressed by cylindrical macro axis.As a results, this system can get any sized surface form in nm order over 100mm specimen size, so temperaturcondition is strictly tight. Then this system must be setted in temperature controled condition or a development of new sensor that can be used in high speed measurement and has precision accuracy.