High-performance measuring station in functional context for high-performance data converters

乌尔姆大学微电子研究所因其对高性能模数转换器（ADC）的研究而享誉全球。高性能是指带宽和采样速率、分辨率、线性度和功耗效率，ADC界通常将其总结为品质因数（FOM）。该研究所的研究工作实现了高达20位的分辨率，GS/s范围内的采样率，> 180 dB范围内的FOM和远高于100dB的固有免校准线性度。研究结果在各种现代工艺（180 nm XFAB，28 nm TSMC，22 nm GF）中原型实现和测量。对于在此性能范围内的测量，许多测量仪器都达到了其能力的边缘，这就是为什么在功能环境的协调配置中需要高性能测量站的原因。这包括：- 通过具有高采样率和有源样本的示波器记录宽带模拟信号，-用于并行调试大量模拟和数字（测试）信号的混合信号示波器，-用于时钟生成的具有非常低相位噪声的宽带信号发生器，-用于实现具有低噪声和最高线性度的超高输入信号质量的具有可变外部滤波的宽带信号发生器，- 窄带信号发生器，用于实现最高输入信号质量，噪声和线性度<-120dBFS -低噪声直流源，带线路滤波器，用于电源和基准电压源。微电子研究所以前使用的测量站已经过时，不再适合计划中的研究工作。提交的大型设备申请旨在使微电子研究所继续成为世界领先的高性能数据转换器研究机构之一。

The Institute for Microelectronics at the University of Ulm is recognized worldwide for its research into high-performance analog-to-digital converters (ADC). High performance is understood in the context of bandwidth and sampling rates, resolution, linearity and power efficiency, which is often summarized in a Figure of Merit (FOM) in the ADC community. Resolutions up to 20bit, sampling rates in the GS/s range, FOM in the range of >180dB and intrinsic, calibration-free linearities far above 100dB are achieved by research work at the institute. Research results are prototypically realized and measured in a variety of modern processes (180nm XFAB, 28nm TSMC, 22nm GF). For measurements in this performance range, many measurement instruments come to the edge of their capabilities, which is why a high-performance measurement station is necessary in a coordinated configuration of a functional context. This includes: - broadband analog signal recording by means of oscilloscope with high sampling rate and active samples, - mixed-signal oscilloscope for parallel debugging of a large number of analog and digital (test) signals, - broadband signal generator with very low phase noise for clock generation, - broadband signal generators with variable external filtering for realization of a high high input signal quality with low noise and highest linearity, - narrowband signal generator for realization of highest input signal quality with noise and linearity <-120dBFS - low-noise DC sources with line filter for supply and reference generation. The measuring station previously used at the Institute of Microelectronics is obsolete and no longer suitable for planned research work. The submitted large-scale equipment application is intended to enable the Institute of Microelectronics to continue to be one of the world's leading research facilities for high-performance data converters.