Hybrid Plasma sulf-nitriding of ion-nitriding and sputtering

靶通常在0.02Torr以下的高度还原气氛中溅射，但离子氮化中离子轰击可在约10Torr的气氛中发生溅射现象，在1-10Torr的气氛中发生钢溅射。因此，首先，钢在1-10Torr的氮气和氢气气氛中，在823K对S进行3.6K-18K的等离子体硫氮共渗。以硫化钼为负极和靶材。钢进行了硫氮化处理。用硫化钼溅射形成了4微米厚的复合层和400微米厚的氮气扩散层。其次，将钢板与硫化钼片平行放置，在两片片之间产生空心阴极放电，对钢板进行硫化氮化处理。形成了8~15微米的复合层和400微米的氮扩散层。在这两种情况下，化合物层由硫化铁和氮化铁层制成。

Target is usually sputtered in highly reduced atmosphere under 0.02 Torr, but sputtering phenomena can arise in about 10 Torr and steel sputters in the atmosphere of 1-10 Torr with ion bombarding in ion-nitriding. So, firstly, steel was plasma sulf-nitrided at 823K for 3.6-18 k s in nitrogen and hydrogen atmospheres of 1-10 Torr. Molybdenum sulfide was used as a negative electrode and target. The steel was sulf-nitrided. Compound layer of 4 mum with nitrogen diffusion layer of 400 mum were formed by sputtering of molybdenum sulfide. Secondly, steel plate was sulf-nitrided by putting pararelly with molybdenum sulfide plate and arising hollow cathode discharge between the two plates. Compound layer of 8-15 mum and 400 mum nitrogen diffusion layer were formed. In both case, compound layers were made with iron sulfide and iron nitride layers.