Development of an Ultra-Precision Dry Process Setter using a Shrink Fitter

制作了激光光源、多面镜、f-θ透镜、抖动测量装置等元件，实现了对抖动的测量。在组装这些元件后，它可以用作干法工艺定型机。首先，用有限元方法对多面镜进行了应力分析，由于多面镜是高速旋转的，所以我们研究了离心力对镜面形状的影响。设计了热缩器的材料和形状。使用每个生产的元素，构建了干法定型机。之后，测量抖动以进行操作检查。为了阐明镜面对抖动的影响，从几何角度进行了考虑，建立了镜面偏离理想平面时抖动的理论计算公式。然后，用激光干涉仪测量具有这6个平面的多边形镜各镜面的形状。测量的镜面用七次或…近似更多的八次多项式。通过对任意位置处的近似进行微分，可以得到任意位置处镜面的梯度，并且可以从理论上获得抖动。利用该测试装置，对已经测量出镜面形状的多面镜的抖动进行了测量。抖动的实测值与理论值吻合较好。在静态下测量了镜面的形状。由于离心力作用在转镜上，镜面的形状将从静止状态变形。然后，在加入考虑离心力的镜面形状变化计算后，再次进行抖动分析。结果表明，计算值更接近实验值。通过本文所做的研究，可以通过测量面形镜在静止状态下的面形来获得旋转多面镜的抖动。较少

Each elements such as laser source, polygon mirror, fθ lens, jitter measuring device were manufactured in order to measure the jitter. It can be used as a dry process setter after assembling these elements. First, stress analysis on the polygon mirror was carried out by FEM.Since the polygon mirror rotated at high speed, we examined how the centrifugal force distorted the shape of mirror surface. Material and shape for the shrink fitter were designed. Using each produced element, the dry process setter was constructed. Afterwards, the jitter was measured for an operation check. The consideration based on the geometry was carried out in order to clarify the effect of the mirror surface on the jitter, and the theoretical formula to calculate the jitter, as mirror surface deviated from the ideal plane, was completed. Next, the shape of each mirror surface of polygon mirror having the 6 planes was measured by laser interferometer. Measured mirror surface was approximated by the seventh or … More eighth polynomial. By differentiating the approximation at the optional place, it is possible to obtain the gradient of the mirror surface at the optional place, and it is possible that the jitter is theoretically obtained. Using the test equipment, the jitter of polygon mirror of which the mirror surface shape had already been measured was measured. The measured value of the jitter was in good agreement with the theoretical value.The shape of mirror surface was measured in the stationary state. The shape of the mirror surface will be distorted from the stationary state, since centrifugal force was acted on the rotational mirror. Then, the jitter analysis was carried out again, after the calculated shape change of mirror surface on the consideration of centrifugal force was added. As the result, the calculated value approached more experimental value. By the research done this time, the jitter of the rotational polygon mirror could be obtained by measuring shape mirror surface shape in the stationary state. Less