权益分类	功能权益	普通用户	{{item.name}}会员
{{category.name}}	{{benefitItem.name}}

Study of 3-dimentional laser imager with wide field of view

宽视场三维激光成像仪的研究

基本信息

批准号：
17360071
负责人：
NITTA Isami
金额：
$ 9.67万
依托单位：
Niigata University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (B)
财政年份：
2005
资助国家：
日本
起止时间：
2005 至 2007
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-17360071/
关键词：
machine element fixing element shrink fitter optical lens ultra precision fixing spot diameter form error scanner シュリンクフイッタ

项目摘要

The aim of this research is to develop a new type of high resolution laser microscope, having a remarkably wide field of view, based on a shrink fitter technology, ahead of the times. lb realize such a laser microscope, it is necessary to assemble a scanning lens, that is the fθ lens, by using a new machine element of shrink fitter. In our previous work, we succeeded in the development of the laser microscope that has a field of view of 10mm wide and a total magnification of about 1,000 times. In the present work we were trying to make the laser spot finer on the focal plane, from 3 μm to 1 μm. lb do this the fθ lens was newly designed. But it was found that such fθ lens design was very difficult and we were not able to satisfy both the fθ characteristics and the telecentricity simultaneously. Telecentricity is a special property of certain multi-element lens designs in which the chief rays for all points across the object lens are collimated. Then we changed our lens design so that th … More e scanning width would be broadened from 10 mm to 50 mm although the spot diameter was also broadened. This change of the lens design, however, is in accordance with the aim of development of the laser microscope having wide field of view.The fθ lens consisting of five optical lenses was designed by optical design software, Code V. Those lenses and the housing were ordered to manufacture. The shrink fitter was made by ourselves with a NC lathe. The sizes and shapes were measured before assembling them. The optical performance of the fθ such as a laser spot on the focal plane, was measured on the optical bench. A laser diode of 405 nm wave length was used. The laser spot diameters in a main-scanning direction became smallest value of 12 μm around the center of the scanning width and 20 μm at the both ends of the scanning width. On the other hand the laser spot diameter in a sub-scanning direction became constant value of 12 urn over the whole scanning width. lb understand why the laser spot diameter in the main-scanning direction became larger at the both ends of the scanning width, we checked possible reasons one by one. Finally we found out the reason. As a result the new type of laser microscope, having a remarkably wide field of view of 50 mm and a high resolution of 6 μm, could be fabricated. Less

这项研究的目的是开发一种新型高分辨率激光显微镜，具有非常宽的视野，基于热缩装配技术，领先于时代。要实现这样的激光显微镜，需要使用新的热缩机元件来组装扫描透镜，即fθ透镜。在我们之前的工作中，我们成功开发了视场宽10毫米、总放大倍数约1000倍的激光显微镜。在目前的工作中，我们试图使焦平面上的激光光斑变得更细，从 3 μm 到 1 μm。为此，fθ 镜头是全新设计的。但我们发现这样的fθ镜头设计难度很大，无法同时满足fθ特性和远心度。远心性是某些多元件镜头设计的特殊属性，其中物镜上所有点的主光线都是准直的。然后我们改变了镜头设计，使扫描宽度从 10 毫米扩大到 50 毫米，同时光斑直径也扩大了。然而，镜头设计的这种变化符合开发具有宽视场的激光显微镜的目标。由五个光学镜头组成的fθ镜头是由光学设计软件Code V设计的。这些镜头和外壳是订购制造的。热缩钳是我们自己用数控车床制作的。在组装之前测量尺寸和形状。 fθ 的光学性能（例如焦平面上的激光光斑）是在光具座上测量的。使用405 nm波长的激光二极管。主扫描方向上的激光光斑直径在扫描宽度的中心附近变为最小值12μm，在扫描宽度的两端处变为20μm。另一方面，副扫描方向上的激光光斑直径在整个扫描宽度上变为12μm的恒定值。为了了解为什么主扫描方向的激光光斑直径在扫描宽度的两端变大，我们一一排查了可能的原因。最后我们找到了原因。由此，可以制造出具有 50 毫米宽视场和 6 微米高分辨率的新型激光显微镜。较少的