A Study on Multi-Degrees of Freedom position and Orientation Control with a High Gain Displacement Amplification Mechanism for Piezoelectric Actuator

研究了一种基于弹性铰链的压电驱动器的位移放大机理。研究的目的是实现高精度、高增益放大的定位机构。首先，提出了一种新的单自由度位移放大机构，并对其特性进行了研究。为了获得高增益放大，采用有限元法对铰链的形状和布置进行了计算和设计。实验制备了单自由度机构。研究了该机构的静、动态特性。在机构设计时，采用有限元法对铰链和连杆的形状和位置数据进行了系统的研究，从而确定了铰链之间的相对位置。讨论了压电作动器一自由度微分式位移放大机构放大比的简单计算方法。将微分型位移放大机构视为刚性单元和弹性铰链的连续构件，采用传递矩阵法计算放大比。将计算结果与更精确的有限元近似解进行了比较，得到了足够的计算精度。建立了机构位移放大比的简单计算方法。采用三维有限元法估计了三自由度的特性。三自由度机构采用三个实验制得的单自由度机构。运动工作台，在水平面上作三自由度方向驱动，即在x和y方向上做两次平移，绕z轴做一次旋转。假定运动台和各单自由度机构通过弹性铰链连接。结果表明，单自由度机构的位移放大比降低了30%左右。还阐明了两平移之间的干涉约为驱动运动的4%，平移与旋转之间几乎没有干涉。少

In this study, a displacement magnification mechanism for piezoelectric actuator using elastic hinges is investigated. The purpose of the study is to realize a precise positioning mechanism with, high gain magnification. First of all, a new one-degree, of freedom( dof ) displacement magnification mechanism is proposed and its characteristics are investigated. Appropriate shape and arrangement of hinges are calculated and designed by finite element method in order to obtain high gain magnification. The one-dof mechanism is manufactured experimentally. Static and dynamic characteristics of the mechanism are investigated. When the mechanism is designed, data of the shape and position of hinges and links are investigated systematically by finite element method, and then relative position among hinges is appropriately determined.A simple calculation method for magnification ratio of one-degree of freedom differential type displacement magnification mechanism using piezoelectric actuator is … More also discussed. The differential type displacement magnification mechanism is treated as a sequential component of rigid elements and elastic hinges, and the magnification ratio is calculated with transfer matrix method. Calculation results are compared with more precise approximated solution by finite element method, and, then sufficient accuracy of calculation is obtained. The simple calculation method for displacement magnification ratio of the mechanism is established.Characteristics of three-dof are estimated using three dimensions finite element method. Three one-dof mechanisms made experimentally are used in the three-dof mechanism. A motion table, is driven in three-dof direction on horizontal plane, i. e. two translations in x and y directions and one rotation about z-axis. The motion table and each one-dof mechanism are assumed to connect with elastic hinges. As the results, displacement magnification ratio lower about 30 % of one-dof mechanism. It is also clarified that interferential between the two translations is about 4 % of driving motion, and that almost no interference is occurred between translation and rotation. Less