Study of photo-molding in order to mass production of micro parts

研制了融合立体光刻技术和成型技术的微切割仪和微成型仪。切割工具与原子力显微镜(AFM)结构相同。安装在AFM悬臂梁顶部的钻石尖端在恒定的法向载荷下接触样品表面，样品沿X和Y方向移动以切割表面。然后，利用激光测位仪测量悬臂梁的挠度，以保持法向载荷恒定。Z方向和X-Y方向的运动分别由PZT工作台和脉冲电机工作台控制。各仪器由PC机控制，并通过GP-IB或RS232C接口连接在一起。因此，在该系统中可以创建的零件的形状为2.5维，微型成型仪可以对由光聚合树脂制成的微型零件进行成型。该仪器主要由1)模组、2)芯腔和3)紫外线照射仪组成。可以制造的微型零件的最小形状大约是10μm宽和1μm深。最大形状约为十毫米宽和几十μ米深。人们认识到，注塑件和模具形状之间的转移非常好。此外，喷射性能取决于型腔上的树脂和润滑剂的量。因此，本研究明确了微细零件批量生产的技术问题。

We developed the micro cutting instrument and micro molding instrument which fuse the stereo-lithography techniques and the molding ones. The cutting instrument is same as the AFM(Atomic Force Microscope) structure. The diamond tip mounted on a top of the AFM cantilever contacts the sample surface under constant normal load and the sample is moved along X and Y direction to cut the surface. Then, the deflections of the cantilever were measured by laser displacement meter to keep constant normal load. The movement of Z direction and X-Y direction are controlled by PZT stage and pulse motor stage, respectively. The each instruments are controlled by the personal computer and connect the GP-IB or RS232C interface together. Therefore the shape of parts which can be created in this system are 2.5 dimension.The micro molding instrument can mold the micro parts which made of photopolymerizable resin. The instrument consists primarily of 1) die sets, 2) core and cavity and 3) UV(Ultraviolet Rays) irradiation instrument. The minimum shape of micro parts which can be made is approximately ten μm wide and one μm depth. The maximum shape is approximately ten mm width and a few ten μm depth. It is recognized that the transfer between molded part and mold shape is very good. Also the ejection property depends on the amount of resin and lubricant on the cavity. So the technical problems of mass production of micro parts make clear in this study.