Study on incandescent microcavity radiator of high luminous efficacy by reduction of infrared radiation

[1]用KrF准分子激光制作了钨微腔辐射器，在沉积有厚度为1μm的钨的石英玻璃的中心区域，以10μm的间隔在直径为5μm的640000个圆柱腔上穿孔。孔径为5μm的腔体的截止波长约为9μm，黑体在波长9μm处的辐射达到最大值的温度约为320K。因此，我们测量了在300~700K加热的样品的光谱辐射存在，并对测量结果进行了详细的分析，在理论分析的基础上对样品的截止特性进行了评估。因此，我们搭建了一台椭偏仪来测量钨的复折射率，并验证了该椭偏仪能够高精度地测量钨的复折射率。

[1] Using KrF excimer laser, we made a sample of tungsten microcavity radiator that was perforated 640000 cylindrical cavities of diameter 5 μm in 10 μm intervals at central region 8 mm x 8 mm of the quartz glass on which tungsten of thickness 1 μm was deposited. The cutoff wavelength of the cavity of aperture 5 μm is about 9 μm and the temperature of black body at which the radiation of wavelength 9 μm becomes a maximum is about 320 K. Therefore, we measured spectral radiant existances of the sample heated at 300〜700 K. By analyzing measurement results in detail based on a theoretical analysis, we evaluated cutoff characteristics of the sample.[2] Complex index of refraction of the tungsten is necessary for design of the tungsten microcavity radiators and evaluation of their luminous efficacy. Therefore, we constructed an ellipsometer in order to measure the complex index of refraction of the tungsten and verified that this ellipsometer measures the complex index of refraction of the tungsten at a high accuracy.