EVALUATION OF DYNAMIC BEHAVIOUR OF MICTOMATERIALS FABRICATED BY SPUTTEINR AND ION-IMPLANTATION METHODS

微型机械将发挥重要的作用，特别是在医疗和工程领域，它们需要在非常狭窄的空间和恶劣的环境中操作。由于微材料的比表面积远大于体积，微机械的运动受到表面性质的强烈控制，如摩擦、流体阻力、润湿性、吸附、腐蚀等。因此，微材料的表面改性和表面性能的评价是非常重要的。从目前的研究中得到以下结果：(1)离子注入在钛衬底上溅射的TiN膜提高了耐腐蚀性和抗氢化物生成能力。(2)在重复的纳米压痕实验中，当压痕深度与薄膜厚度相当时，TiN、AlN薄膜和非晶态碳化硅薄膜的压痕深度出现了反向偏差。这一事实与薄膜中较大的残余压应力是通过薄膜的部分分层释放出来的。残余压应力较大的碳化硅薄膜的后向偏差程度大于TiN和AlN薄膜。在较小的载荷附近，由于压头下方的分层，观察到了较大的深度恢复。(3)块体金属、玻璃和陶瓷表面的载荷-位移曲线不同，取决于残余应力、表面粗糙度、表面微裂纹、压实行为和塑性变形的存在。(4)较低的压痕速度导致较大的后向偏差，这是由于压痕肩部堆积较大，从而导致该位置的薄膜分层。(5)原子力显微镜测得的金属和陶瓷材料的动态摩擦系数随作用力、表面粗糙度和湿度的增加而增大，但与探头扫描速度无关。因此，利用纳米压头和原子力显微镜可以获得有关微材料和薄膜表面和界面性质的新信息。

Micro-machines will act an important role especially in medical and engineering area where they should be operated in very narrow space and in severe environments. The movement of micro-machine is strongly controlled by surface properties, such as friction, fluid resistance, wettability, adsorption, corrosion, etc., because the surface area of micro materials is much larger than the volume. Consequently, surface modification of micro materials and evaluation of surface properties are very important.From present researches following results were obtained : (1) Ion implantation on TIN film sputtered on titanium substrate increases the corrosion and hydride formation resistances. (2) During repeating nano-indentation tests, when the indent depth is comparable with film thickness, the indent depth of TIN and AIN films and amorphous Sic film reveals backward deviation. This fact corresponds that large residual compressive stress in the films is released by partial delamination of films. The degree of backward deviation is larger for SiC film with larger residual compressive stress than TiN and AIN films. Large depth recovery is observed for SiC film near smaller load due to the delamination just under indenter. (3) The load-displacement curves of surface are different in bulk metals, glasses and ceramics, depending on the existence of residual stress, surface roughness, surface micro-cracks, compaction behavior, and plastic deformation. (4) Slower indentation speed results in larger backward deviation due to larger piling up of indent shoulder that introduces delamination of film at the position. (5)Dynamic friction coefficients measured by atomic force microscope for metals and ceramics increase with increasing applied force, surface roughness and humidity but not depend on scanning speed of probe. Thus, new information on the surface an interfacial properties of micro-materials and thin films were obtained by using nano-indenter and atomic force microscope.