Fabrication of high performance sensing film for gas sensor by the nano structural control using mass controlled layer-by-layer sequential deposition

通过增加敏感膜的表面积，大大提高了氨基气体传感器的性能，当气敏元件的敏感膜具有多孔结构时，由于气体的高扩散，气敏元件具有高速和高灵敏度的响应。本研究采用浇注法和顺序吸附法制备了片状α-磷酸锆气敏薄膜，并对其作为氨气传感器的性能进行了评价。将该传感器与传统的α-ZrP铸膜型传感器进行了比较。在氨气浓度为5ppm的条件下，对传感器进行了表征。结果表明，用片状颗粒作为气敏元件的敏感膜时，其响应时间比普通α-ZrP气敏元件缩短了一半，灵敏度提高了一倍，最终成功地实现了对100 ppb氨气的检测。

By increasing the surface area of the sensing film, the performance of the ammonium gas sensor was drastically improved in this study.When the sensing films of gas sensors have porous structure, gas sensors have high speed and highly sensitive response because of the high gas diffusion. In this study, the sheet particulates of α-zirconium phosphates were deposited on the electrode of QCM by casting or sequential adsorption method and the fabricated sensing film was evaluated as a gas sensor for ammonia. This sensor is compared with that using the conventional α-ZrP cast film. Under the 5ppm gas concentration of ammonia, sensor characterization were performed. As the results, when the sheet particulates were used as the sensing films for the gas sensors, the response time was halved and the sensitivity was doubled with those using normal α-ZrP And finally, 100ppb ammonium gas was successfully detected by the developed ammonium gas sensor.