The elucidation of marangoni flow and micro liquid films structure in solid/gas/liquid interphase with the gas dissolution

在固/液/气界面所谓三相边界线上，有气体溶解、吸附现象，表现为浓度差和温差引起的马兰戈尼流。液频、微重力、固液相相对运动等外力作用于该区域，边缘呈半月板状，形成薄膜，由于浓度差形成强烈的流动。这种现象被应用于半导体制造和吸收式制冷机的清洗和干燥过程中。如果在这些设备的元件装置中存在的这一区域促进气体溶解现象，将改善这些装置局部部分的传热传质。设备和工艺的节能和资源节约得到进一步的发展。这一课题要求通过基础研究，精确分析装置运行时马兰戈尼流的流动行为。在此背景下，本研究旨在获得控制边界传质现象的外部因素的基础知识。对马兰戈尼流控制的各种传质现象进行了实验分析，得到了以下结果：我们认为，界面蠕动运动产生的表面波的振动和振幅成分随固体表面的润湿性而变化。并检测了马兰戈尼流对边界的动态影响。结果表明，无论固体表面的润湿性如何，动态效应所指向的方向是相同的。此外，我们澄清了边界方向的速度绝对值随固体表面润湿性的不同而不同。

In solid/liquid/gas interfaces so-called the three-phase boundary line, with gas dissolution, adsorption phenomena, marangoni flow which is resulted from concentration difference and temperature difference is expressed. External force such as liquid frequency, micro gravity and relative movement of solid phase to liquid phase is operating in this region, a meniscus of edge becomes a thin film and, it is observed that intense flow is developed due to a concentration difference. This phenomena are applied cleaning and drying process in semiconductor manufacturing and absorption chiller. If gas dissolution phenomena are promoted in this region which exists in the element apparatus of these equipments, heat and mass transfer in a local part of these devices will be improved. And energy and resource saving of devices and the process come to advance further. Such a subject is asking for analyzing precisely a flow behavior of Marangoni flow at the time of the operation of apparatus through a fundamental research.This research aimed at acquiring the base-knowledge about external factors which is governing the mass transfer phenomena in the boundary against the background of such a situation. Various kinds of mass transfer phenomena which Marangoni flow governs were analyzed experimentally, and obtained the following results.We suggested that the vibrations and the amplitudes ingredient of the surface waves generated by the interface peristalsis movement change with wettability of solid surface. And, we detected the dynamic effect which works to the boundary by marangoni flow. Consequently, we clarified that a direction which a dynamic effect commits is the same regardless of the wettability of solid surface. Moreover, we clarified that absolute values of velocity of the boundary directions differ with wettability of the solid surface.