Trial production research of an super clean robot corresponding to a high vacuum, which is indispensable in a next-generation semiconductor manufacture process

针对应用磁轴承和磁悬浮技术的超清洁机器人，实现了完美的非接触式三维机器人，于2001财年末完成了垂直方向的独立检测、管理圆周绕垂直轴运动的旋转执行器和管理径向移动的直线执行器。研究了旋转执行器外转子上安装的直线执行器在旋转过程中的稳定悬浮控制问题，以动力学模型为指标，设计了中心位置和最大伸展位置的两个H_无穷控制器，并通过改变两个控制器的增益比来实现增益预定控制器。利用实时LI…在PC机上实现了增益调度控制器采用微步进系统作为旋转执行器步进电机的驱动系统，通过开环达到了预期的定位精度。2003财年，直线执行器的增益表H_无穷控制的设计点选在中心，两端各有一个。控制器的增益通过三个设计点之间的线性插补得到，从而减小高阶固有振动。为了减小到达目标位置后旋转执行器中的残余角振动，尝试调整步进电机的脉冲发生时序。2004财年，我们采用了磁化磁极机角的相位补偿和磁化电流的电动角检测执行器的角速度，以立即减少到达预定位置后的自由振动，缩短了定位时间。通过这种方法，我们成功地缩短了旋转执行器从运动到静止的时间。较少

Aiming at a super clean robot applying the technology of a magnetic bearing and magnetic levitation, and realizing a perfect non-contact 3-dimensional robot, we have completed the independent examination of the perpendicular direction, the rotary actuator which manages movement of the circumference around the perpendicular axis, and the linear actuator which manages movement of a radial direction is completed by the end of fiscal 2001.In fiscal 2002,we studied on stable levitation control of the linear actuator installed on the outer rotor of the rotary actuator in rotation of the rotary actuator.Two H-infinity controllers at the center position and the maximum extension position are designed using the dynamic model as a measure against a robust unstable high order natural vibration and a gain scheduled controller is realized by changing gain ratio of two controller in proportion to a traveling distance of the actuator. The gain scheduled controller is implemented in PC by real time Li … More nux.The micro step system has been adopted as a drive system of the stepping motor of the rotary actuator, and the desired accuracy of positioning is achieved by the open loop.In fiscal 2003,the design point of the gain schedule H-infinity control of the linear actuator was selected at the center, two both end. The gain of the controller is given by the linear interpolation among the three design points and then the the high order natural vibration is decreased.In order to decrease the residual angular vibration in the rotary actuator after arrival to a target position, we try adjustment of the pulse generating timing of a stepping motor. A little improvement is achieved but residual vibration remains.In fiscal 2004,we adopted a phase compensation of the machine angle of a magnetization magnetic pole, and an electric angle of the magnetizing current detecting an angular velocity of the actuator in order to reduce immediately the free vibration after arriving at a predetermined position and to shorten positioning time. We succeeded in shortening of the time from movement of the rotatary actuator to stillness by this method. Less