Isolation Control of Micro Vibration to Realize Micro and Fine Manufacture

微振动隔离控制实现微细制造

• 批准号: 09650272
• 负责人: KANEMITSU Yoichi
• 金额: $ 2.11万
• 依托单位: KYUSHU UNIVERSITY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1997
• 资助国家: 日本
• 起止时间: 1997 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-09650272/
• 关键词: Magnetic levitation; micro vibration; vibration isolation; magnetic bearing; election microscopy; robust control theory; electron beam control; semi-conductor manufacture apparatus; 半導体検査装置; 制振制御

We have designed controllers for two kinds of magnetically levitated isolators from micro vibration of installation floors. Since the magnetically levitated isolators are non-contact, no-friction and controllable, they are expected to have an ability to reduce vibration level to many kinds of semi-conductor inspection or manufacture apparatuses from the installation floor.One of the designed isolator is a large-sized isolator carrying up to 200kg mass such as a Scanning Electron microscopy (SEM) and another is a small-sized isolator carrying up to 20kg mass such as an Atomic Force Microscopy (AFM). 4 magnetically levitated actuators support the large-sized isolator, and 3 actuators support the small-sized isolator. A decentralized controller in vertical direction has been designed using a relative displacement sensor in the actuator and an accelerometer on the levitated table as sensors for levitation and isolation control.We employed the HィイD1∞ィエD1 robust control theory in the control … More ler design because dynamic specifications of the loaded apparatus is uncertain, magnetic actuator has large non-linearity and the flexibility of the levitated table was ignored.After estimation of the designed controller by numerical simulations, we implemented the controller in DSP and measured the isolation performance of the isolator. But the experimental results did not show efficient isolation performance. Accordingly, we dopted a centralized considering vertical motion and two angular motion around 2 horizontal axes and implemented the controller in DSP. But we could not get good isolation performance.Afterward we have adopted the sub-space method for the identification of dynamic model of the isolator and control of the isolator as we worried that a cause of the bad performance was the error in the dynamics of the levitated table and the magnetic actuator.We also studied a new control method for vibration isolation of SEM manipulating the electron beam in SEM using the image shift coil of SEM by the adaptive feed forward control of the floor vibration. Less

针对两种磁悬浮隔振器的安装地面微振动设计了控制器。由于磁悬浮隔离器是非接触、无摩擦和可控的，设计的隔振器一种是扫描电镜（SEM）等质量可达200kg的大型隔振器，另一种是小型隔振器，例如，原子力显微镜（AFM）等尺寸的隔离器承载高达20kg的质量。4个磁悬浮致动器支撑大尺寸隔离器，3个致动器支撑小尺寸隔离器。利用作动器中的相对位移传感器和悬浮平台上的加速度传感器作为悬浮和隔振控制的传感器，设计了垂直方向的分散控制器，并采用H ∞控制理论进行控制 ...更多信息 由于负载设备的动态特性不确定，磁致动器具有较大的非线性，且忽略了悬浮平台的柔性，因此，本文设计了一种基于DSP的磁致动器隔振器，并对该隔振器的隔振性能进行了测试。但实验结果并没有显示出有效的隔离性能。因此，我们采用了一个集中考虑垂直运动和两个角运动围绕两个水平轴和DSP实现的控制器。但在实际应用中，隔离效果并不理想。针对悬浮平台和磁致动器的动力学误差是导致隔振效果不佳的原因之一的问题，提出了一种基于空间法的隔振器动力学模型辨识和隔振器控制方法，并研究了一种利用移像线圈控制电子束的扫描电镜隔振控制方法。SEM通过自适应前馈控制的地板振动。少

项目成果

K.Matsuda: "Identification and Control of a Magnetically Levitated Table"Proc.of the 5th International Symposium on Magnetic Suspension Technology. 23. 1-7 (1999)

K.Matsuda：“磁悬浮台的识别与控制”第五届国际磁悬浮技术研讨会论文集。

K.Matsuda: "Active Vibration Suppression on an Image of a Scanning Electron Microscopy"Proc.of SPIE' 25th Annual International Symposium on Micro-Lithography. 1-9 (2000)

K.Matsuda：“扫描电子显微镜图像上的主动振动抑制”SPIE 第 25 届国际微光刻年会论文集。

Y. Kanemitsu: "Control of levitation and vibration of magnetic bearing type isolator for absolute gravimeter"Proc. of the 6th International Symposium on Magnetic Bearings. 67-76 (1998)

Y. Kanemitsu：“绝对重力仪磁力轴承式隔离器的悬浮和振动控制”Proc。

Kanemitsu,Y. Kijimoto,S: "Control of Levitation and Vibration of Magnetic Beating Type Isolatoy for Absolute Gravimeter" Proceedings of 6^<th> International Symposium on Mapertic Bearings. 67-76 (1998)

兼光，Y.

K. Matsuda, et al.: "Active vibration suppression on an image of a scanning electron microscopy"Proc. of the SPIC's 25ィイD1thィエD1 annual international symposium on micro-lithography. 1-9 (2000)

K. Matsuda 等人：“扫描电子显微镜图像上的主动振动抑制”，SPIC 第 25 届国际微光刻研讨会论文集 1-9 (2000)。