Study of 3-dimentional laser imager with wide field of view

本研究的目的是基于收缩贴合技术，走在时代的前列，研制出一种视场非常宽广的新型高分辨率激光显微镜。要实现这样的激光显微镜，必须使用一种新的机械元件--收缩贴合来组装一个扫描透镜，即f-θ透镜。在之前的工作中，我们成功地研制出了视场宽10 mm，总放大约1000倍的激光显微镜。在目前的工作中，我们试图使激光焦面上的光斑更精细，从3μm到1μm。lb做到了这一点，fθ透镜是新设计的。但人们发现这种f-θ透镜的设计非常困难，不能同时满足f-θ特性和远心。远心性是某些多元素透镜设计的一种特殊性质，在这种设计中，物镜上所有点的主光线都是准直的。然后我们改变了镜头设计，这样…更多的e扫描宽度将从10 mm加宽到50 mm，但光斑直径也会加宽。这种透镜设计的变化，符合激光显微镜大视场发展的目标，由5个光学透镜组成的fθ透镜是用光学设计软件CodeV设计的，这些透镜和外壳都是奉命制造的。这套紧固件是我们自己用一台数控车床制作的。在组装之前，尺寸和形状都被测量过了。在光学台上测量了f-θ的光学性能，如焦面上的激光光斑。采用波长为405 nm的激光二极管。主扫描方向的激光光斑直径最小，扫描宽度中心附近为12μm，扫描宽度两端为20μm。另一方面，副扫描方向上的激光光斑直径在整个扫描宽度上变为恒定值12微米。为了了解主扫描方向激光光斑直径在扫描宽度两端变大的原因，我们逐一检查了可能的原因。最后，我们找到了原因。结果表明，这种新型激光显微镜具有50 mm的大视场和6μm的高分辨率。较少

The aim of this research is to develop a new type of high resolution laser microscope, having a remarkably wide field of view, based on a shrink fitter technology, ahead of the times. lb realize such a laser microscope, it is necessary to assemble a scanning lens, that is the fθ lens, by using a new machine element of shrink fitter. In our previous work, we succeeded in the development of the laser microscope that has a field of view of 10mm wide and a total magnification of about 1,000 times. In the present work we were trying to make the laser spot finer on the focal plane, from 3 μm to 1 μm. lb do this the fθ lens was newly designed. But it was found that such fθ lens design was very difficult and we were not able to satisfy both the fθ characteristics and the telecentricity simultaneously. Telecentricity is a special property of certain multi-element lens designs in which the chief rays for all points across the object lens are collimated. Then we changed our lens design so that th … More e scanning width would be broadened from 10 mm to 50 mm although the spot diameter was also broadened. This change of the lens design, however, is in accordance with the aim of development of the laser microscope having wide field of view.The fθ lens consisting of five optical lenses was designed by optical design software, Code V. Those lenses and the housing were ordered to manufacture. The shrink fitter was made by ourselves with a NC lathe. The sizes and shapes were measured before assembling them. The optical performance of the fθ such as a laser spot on the focal plane, was measured on the optical bench. A laser diode of 405 nm wave length was used. The laser spot diameters in a main-scanning direction became smallest value of 12 μm around the center of the scanning width and 20 μm at the both ends of the scanning width. On the other hand the laser spot diameter in a sub-scanning direction became constant value of 12 urn over the whole scanning width. lb understand why the laser spot diameter in the main-scanning direction became larger at the both ends of the scanning width, we checked possible reasons one by one. Finally we found out the reason. As a result the new type of laser microscope, having a remarkably wide field of view of 50 mm and a high resolution of 6 μm, could be fabricated. Less