Development of an Ultra-Precision Dry Process Setter using a Shrink Fitter

使用热缩机开发超精密干式工艺安装机

• 批准号: 10555050
• 负责人: NITTA Isami
• 金额: $ 1.92万
• 依托单位: Niigata University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10555050/
• 关键词: Machine Element; Fixing Element; Shrink Fitter; Optical Lens; Ultra-Precision Joining; Laser Spot; Laser; Scanner; ドライプロセス; 超精密結合

Each elements such as laser source, polygon mirror, fθ lens, jitter measuring device were manufactured in order to measure the jitter. It can be used as a dry process setter after assembling these elements. First, stress analysis on the polygon mirror was carried out by FEM.Since the polygon mirror rotated at high speed, we examined how the centrifugal force distorted the shape of mirror surface. Material and shape for the shrink fitter were designed. Using each produced element, the dry process setter was constructed. Afterwards, the jitter was measured for an operation check. The consideration based on the geometry was carried out in order to clarify the effect of the mirror surface on the jitter, and the theoretical formula to calculate the jitter, as mirror surface deviated from the ideal plane, was completed. Next, the shape of each mirror surface of polygon mirror having the 6 planes was measured by laser interferometer. Measured mirror surface was approximated by the seventh or … More eighth polynomial. By differentiating the approximation at the optional place, it is possible to obtain the gradient of the mirror surface at the optional place, and it is possible that the jitter is theoretically obtained. Using the test equipment, the jitter of polygon mirror of which the mirror surface shape had already been measured was measured. The measured value of the jitter was in good agreement with the theoretical value.The shape of mirror surface was measured in the stationary state. The shape of the mirror surface will be distorted from the stationary state, since centrifugal force was acted on the rotational mirror. Then, the jitter analysis was carried out again, after the calculated shape change of mirror surface on the consideration of centrifugal force was added. As the result, the calculated value approached more experimental value. By the research done this time, the jitter of the rotational polygon mirror could be obtained by measuring shape mirror surface shape in the stationary state. Less

为了测量抖动，制造了激光源、多角镜、fθ透镜、抖动测量装置等各个元件。组装这些元件后，它可以用作干法安装器。首先，利用有限元法对多面镜进行应力分析。由于多面镜高速旋转，我们研究了离心力如何使镜面形状扭曲。设计了热缩钳的材料和形状。使用每个生产的元件，构建了干式工艺设定器。然后，测量抖动以进行操作检查。为了明确镜面对抖动的影响，进行了基于几何的考虑，完成了镜面偏离理想平面时抖动的理论计算公式。接下来，通过激光干涉仪测量具有6个平面的多角镜的每个镜面的形状。测量的镜面表面由第七或第八多项式近似。通过对任意处的近似求微分，就可以得到任意处镜面的梯度，理论上就有可能得到抖动。使用该测试设备，测量已经测量了镜面形状的多面镜的抖动。抖动测量值与理论值吻合较好。镜面形状是在静止状态下测量的。由于离心力作用在旋转镜上，镜面的形状将从静止状态扭曲。然后，加上计算出的考虑离心力的镜面形状变化后，再次进行抖动分析。结果表明，计算值更接近实验值。通过本次研究，可以通过测量静止状态下的形状镜面形状来获得旋转多面镜的抖动。较少的