Fabrication of photonic crystal by micro-molding using a mold of photostrictive element PLZT

这项研究的目的是为了更容易地制备光子晶体。这项研究提出了一种使用模具的微型零件成型系统，该模具可以变形为任何形状。该系统将压印技术与精密模具相结合，实现了微型塑料件的廉价批量生产。该系统的基本原理如下：首先，模具采用可通过紫外光改变形状的光致伸缩元件PLZT陶瓷。使用掩模调整紫外线的照射范围，以便可以将芯片改变为任何所需的形状。接下来，将模子装满光聚合聚合物，并将其封闭在玻璃板中。然后，紫外线照射到模具上，使零件成型。首先，为了验证PLZT陶瓷的特性，研制了一套测试装置，测量了PLZT陶瓷在紫外光照射下的相变转变和相变响应时间。结果表明，PUT表面的位移是亚微米级的，PLZT表面的形状不会变成掩模的形状。

The purpose of this study is to fabricate the photonic crystal easily. This study proposes a micro-parts molding system using a die which can be transformed to any shape. This system combines imprinting technology with precision dies, realizing inexpensive mass production of micro plastic parts. The fundamental principle of the system is as follows.First, photostrictive element PLZT ceramics whose shapes can be changed using ultraviolet ray are used for die. The irradiation range of the ultraviolet ray is adjusted using a mask so that the die can be changed to any desired shape. Next, the die is filled with photopolymerizing polymer and closed in the glass plate. Ultraviolet ray is then irradiated on the die to mold the part. In this development, first a measuring device was developed in order to verify the characteristics of the PLZT ceramics.The transition of the transformation and the transformation response time of the PLZT ceramics while ultraviolet ray was irradiated were also measured. As a result, it is clear that the displacement of PUT surface is a sub-um level and the shape on the PLZT surface does not become shape of the mask.