Development of Micro-Pump without Power Supply with the aid of Peltier Devices and Deformation Material

微泵是MEMS技术的应用研究和开发领域之一。其基本形式是随着微电子机械系统技术的发展，从80年代末的S到90年代初的S提出的。本研究的目的是借助Peltier器件的加热和冷却特性，设计和开发一种通过热变形材料的膨胀和收缩来驱动的圆柱形微型泵。Peltier装置被周期性地加热和冷却，相应的热变形材料单元导致热膨胀和压缩。在这些运动的帮助下，微泵内的工质流动。用X射线衍射仪和PIV方法揭示了这种流动现象。

The micro pump is one of the application research and development fields of the MEMS technology. Its fundamental form is proposed from the end of the 1980's to the beginning of the 1990's with the MEMS technology development. The aim of the present study is to design and develop a cylindrical micro pump which is driven by expansion and contraction of the heat deformation material with the aid of heating and cooling properties of Peltier devices. The Peltier devices are periodically heated and cooled and the corresponding heat deformation material unit causes heat expansion and compression. With the aid of these motions, the working fluid filed in the micro-pump flows. The flow phenomenon is disclosed by X-ray apparatus and PIV method.