Development of depth profile analysis of nano materials using X-ray energy variable XPS

硬X射线光电子能谱（HX-XPS）是在同步辐射装置上利用可变能量硬X射线对纳米材料进行分析的一种新方法。HX-XPS深度剖面分析是一种很有前途的定量无损深度剖面分析技术。为了进一步发展这一技术，必须对影响HX-XPS谱的非对称性参数、发射深度分布函数（EDDF）和能量损失函数进行定量评价。本工作开发了精确的算法，该算法通过结合角分辨和能量分辨的HX-XPS测量、Monte Carlo模拟和REELS分析来评估这些量。以具有核壳结构（核：Ag，壳：聚丁二炔）的纳米粒子为例，成功地进行了HX-XPS分析。

Hard X-ray photoemission spectroscopy (HX-XPS) has been developed for the analysis of nano materials using energy-variable hard X-ray at synchrotron radiation facilities. The depth profile analysis by HX-XPS is promising as a quantitative nondestructive depth profile technique. For the further development of this technique, the asymmetry parameter, the emission depth distribution function (EDDF) and energy loss function which govern the HX-XPS spectra should be evaluated quantitatively. This work developed the precise algorism which evaluates these quantities by the combination of the angle-resolved&energy-resolved HX-XPS measurements, Monte Carlo simulation and REELS analysis. As an example, HX-XPS analysis of nano particles, which has core-shell structure (core : Ag, shell: polydiacetylene), has been carried out successfully.