Plasma processes by high reactivity atmospheric pressure H_2O plasma

开发了利用对环境影响小的水作为等离子体气体的等离子体源。水能有效地吸收微波（2.45 GHz）。设计了常压下等离子体产生的微波谐振腔形式，采用气流稳定放电。利用该常压等离子体进行了表面清洗、表面处理和有机物分解研究。由于生成的等离子体密度高，因此在高密度中产生了活性化学自由基。该方法可用于高速等离子体处理，并证明了常压H_2O等离子体处理的有效性。

The plasma source using the water of the low environmental impact as plasma gas was developed. Water absorbs a microwave (2.45 GHz) efficiently. The form of the microwave resonator was devised for the plasma generation in an atmospheric pressure, and the gas flow was used for stabilization of discharge. Research on the surface cleaning, surface treatment, and organic matters decomposition using this atmospheric pressure plasma was done. Since the density of the generated plasma was high, activity chemically radicals were generated in high density. High-speed plasma treatment could be performed by this, and the effectiveness of atmospheric pressure H_2O plasma was shown.