High spatial-resolution crystal structure analysis using annular dark-field imaging

扫描电子显微镜(STEM)中的环状暗场(ADF)成像是表征局部晶体结构的有效工具，因为ADF成像具有很高的成分灵敏度和直观的可解释性。在这项研究中，我们使用STEM成像对晶体结构进行了高灵敏度和高精度(10 PM)的分析。揭示了ADF成像的非相干成像近似的有效性。我们还实现了所谓的空间分辨衍射术，即完全获得作为探针配位函数的衍射图，以研究STEM成像的机理。

Annular dark-field(ADF) imaging in scanning transmission electron microscopy(STEM) is an effective tool for the characterization of local crystal structure, because ADF imaging has high compositional sensitivity and intuitive interpretability. In this study, we performed high sensitivity and high precision(10pm) analyses of crystal structures using STEM imaging. We revealed the validity of incoherent imaging approximation of ADF imaging. We also achieved so-called spatially-resolved diffractometry, in which the diffraction patterns are fully acquired as a function of probe coordination to investigate the mechanism of STEM imaging.