Development of Bio fluid chip and measurement by Multi-dimensional micro process tomography method

采用MEMS工艺制作了一种新型微通道，该通道由石英玻璃和铂丝构成，具有五个测量截面，每个截面嵌入80个电极。采用微过程层析成像(MPT)技术，研究了新型微通道内颗粒-液两相流的三维颗粒浓度分布。在获得的三维重建图像中，介电粒子注入区域显示出较高的粒子浓度，而去离子注水区域沿x轴方向显示出较低的粒子浓度。将三维重建图像的定性结果与x轴上颗粒浓度的定量结果进行了比较，结果表明颗粒在横截面的颗粒注入区域内分布合理。此外，为了验证MPT重建图像，对颗粒相采用离散拉格朗日方法，对液体相采用欧拉方法进行了数值模拟。数值模拟计算的颗粒浓度分布与微通道内MPT重建图像定性地吻合。

The novel microchannel using quartz glass and platinum wire with the five measurement cross-sections and the embedding 80 electrodes in each cross-section has been successfully fabricated by MEMS process. The 3D particle concentration distribution in a particle-liquid two-phase flow in the noval microchannel was revealed by the micro process tomography (MPT) method. In the obtained 3D reconstruction image, the dielectric particle-injected area appears to have a high particle concentration, and the deionized water-injected area appears to have a low particle concentration along the x-axis. A comparison of the qualitative results for the 3D reconstruction image and the quantitative results for the particle concentration along the x-axis reveal that the particles are reasonably well distributed in the particle-injected area of the cross-section. In addition, numerical simulations combing the discrete Lagrangian method for the particle phase and the Eulerian method for the liquid phase are performed in order to verify the MPT reconstruction image. The particle concentration pattern calculated by the numerical simulations agrees qualitatively with the MPT reconstruction image in the microchannel.