Visualization and Measurement on Nano Particle Multiphase Flow using Process Tomography

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The micro channels were manufactured experimentally with various MEMS devices at Micro Device Center in Funabashi Campus in 2004.The developed things are : 1) a sensitivity map calculation for micro Process Tomography and 2) a cord of highly precise inverse problem analytical technique for micro PT in "software development of micro PT"More precisely, (1) a recipe (a condition) of mask aligner and ICP etching device was discussed.In addition, (2) an electrode placement to micro channel was produced and I mastered the know-how of micro-channel production and made a micro-electrode by MEMS technology with using sputtering.Furthermore, (3) a measurement of flow impedance was performed and I applied an image reconfiguration cord with the results of a nano particle fluid and measured relations of a nano-particle and impedance in the micro-channel with electrode.The visualization and measurement of nano-particle concentration distribution in micro-channel was performed.