A novel fresh surface preparation technique: in-situ solid phase crystallization and its application to STM

用脉冲激光沉积法在玻璃基片上制备了NbO_2非晶薄膜，并采用不同的氧化态靶材进行了晶化。弱（110）取向薄膜的生长条件受到靶氧化条件的限制。在（110）NbO_2薄膜上生长了性能得到改善的功能材料Ta：SnO_2和W：SnO_2。用STM/STS对沉积态非晶薄膜的表面进行了探测。观察到不规则的形状，没有原子分辨率，这表明存在吸收的空气。在STM室中进行原位固相晶化后，有望观察到原子级分辨率的图像。

NbO_2 thin films were crystallized from amorphous films fabricated on glass substrates by pulsed laser deposition using various oxidative state targets. Weakly (110 oriented films can be grown in a limited condition, which is dependent on target oxidation condition. Functional materials such as Ta:SnO_2 and W:SnO_2 with improved properties were grown on (110) NbO_2 thin films. The surface of as-deposited amorphous films were probed by STM/STS. A irregular shape without atomic resolution, which suggest the existence of absorbed air were observed. An atomic resolution image is expected to be observed after in-situ solid state crystallization in STM chamber.