Polymer surface morphology control by reactive ion etching and its application

在这项研究中，我们开发了一种新的反应离子刻蚀（RIE）方法，以控制聚合物的表面形貌在很宽的范围内，从光滑的表面到草状表面。结果表明，微掩模浓度与薄膜的形貌密切相关。然后，采用RIE和胶体光刻（CL）相结合的方法制备有序颗粒单层膜作为刻蚀掩模，在聚合物表面形成微纳阵列结构。最后，将PMMA上的纳米锥阵列结构应用于蛋白质芯片，由于其大的表面积，该结构可有效地用于蛋白质检测。

n this study, we have developed the novel reactive ion etching (RIE) method to control polymer surface morphology in the wide range from smooth surface to grassy surface. It is found that the morphology is closely related to micromask concentration. Then, micro/nano array structure was formed on the polymer surface by using a combination of the RIE and colloidal lithography (CL) to prepare ordered particle monolayer as etching mask. Finally, a nanocone array structure on a PMMA was applied to protein chip, and the structure was effective for protein detection because of its large surface area.