Development of electron-impact ion source using RF electric field for enhancing ionization rate of thermal ionization mass spectrometer

为提高热电离质谱计的电离率，进行了射频电场电子轰击离子源的研制。在蒸发灯丝和电离灯丝之间施加射频(200-250 MHz)电场，通过电离灯丝的一侧紧密地安装在离子源中。用法拉第杯检测离子源产生的离子总量，然后用Q-质谱仪测量单个元素的离子。可以清楚地看到，随着射频输入功率的增加，离子的数量也在增加。实验结果表明，射频电场对提高热电离质谱的电离率是有效的。

Development of electron-impact ion source using RF electric field has been conducted aiming at the enhancement of ionization rate of thermal ionization mass spectrometer. The RF (200-250 MHz) electric field was applied between the evaporation and ionization filament closely built in an ion source via one side of the filaments. Total amount of ions created from the ion source was detected by a Faraday cup, and then ions of individual elements were measured with a Q-mass spectrometer. It was clearly observed that the amount of ions was enhanced with the increase of the RF input power. The experimental results indicate that the RF electric field is effective to the enhancement of ionization rate of the thermal ionization mass spectrometry.