Alternating Current-Induced Damage in Metal Interconnects

该项目的目标是研究一种新的类型的损坏，已发现在金属互连，这是由于通过随时间变化的电流。损伤是由于互连中的焦耳热引起的循环热应变的疲劳而产生的。该项目的基本意图是探索这种新现象的一般行为。特别是，在小型结构的热疲劳机制将进行调查，并在技术相关的设备互连可靠性的影响将进行评估。将研究互连材料（Al和Cu）、互连尺寸和微观结构、温度的影响以及与经典电迁移损伤的相互作用的影响。该项目是根据KOSEF-DFG合作计划与韩国首尔国立大学（SNU）的Young-Chang Joo教授提出的国际合作项目。部分工作将在SNU进行，部分工作将在Max-Planck-Institut für Metallforschung（MPI）进行。已向韩国科学和工程基金会（KOSEF）提出了将在SNU进行的工作，并已要求从2002年4月起提供为期两年的资金。在这项提案中，我们正在申请资金，用于在MPI开展的工作和德国科学家前往韩国的旅行。

The goal of the project ist to study a new type of damage that has been discovered in metal interconnects and that is due to the passage of time-varying electrical currents. The damage is generated by fatigue from the cyclic thermal strains due to joule heating in the interconnects. The basic intent of the project is to explore the general behavior of this new phenomenon. In particular, the mechanisms for thermal fatigue in small structures will be investigated and the impact on interconnect reliability in technologically relevant devices will be assessed. The influence of interconnect material (Al and Cu), interconnect dimensions and microstructure, the effect of temperature, and the interaction with classical electromigration damage will be studied. This project is proposed as an international collaboration with Prof. Young-Chang Joo at Seoul National University (SNU) in Korea under the KOSEF-DFG Cooperative Program. Part of the work will be performed at SNU and part at the Max-Planck-Institut für Metallforschung (MPI). The work that will be done at SNU has been proposed to the Korea Science and Engineering Foundation (KOSEF) and funding has been requested for a period of two years starting in April 2002. In this proposal, we are applying for funding for the work to be carried out at MPI and for travel of German-based scientists to Korea.