Intra-corporeal MRI/NMR probe using non-planar photofabrication

本研究的目的是在圆柱形衬底上利用光刻胶图案化和电镀铜制作的体内磁共振/核磁共振探头实现对人体局部组织的高分辨率成像。通过重复非导电层镀膜后的工艺制作多层线圈图案，提高了成像性能。设计并制作了可补偿线圈周围组织频移的小尺寸可变电容集成电路。确认了核磁共振信号的接收，并利用安装在探头上的电路进行了图像估计。利用研制的保护电路，实现了核磁共振信号的接收和集成电路的无电击穿成像。

The purpose of this research is realization of high-resolution imaging of local area tissue in the human body using an intra-corporeal MRI/NMR probe fabricated using photoresist pattering and Cu electroplating on the cylindrical substrate. Performance of imaging is improved by multilayered coil pattern fabricated by repeating the process after coating of nonconductive layer. Small size integrated circuits of variable capacitor which can compensate frequency shift by tissues around the coil have been designed and fabricated. Signal receiving of NMR signal was confirmed and image estimation was performed using the mounted circuit on the probe. Receiving NMR signal and imaging without electric breakdown of the integrated circuit was realized using developed protecting circuit.