Development of a differential air bearing screw

研制了一种定位准确、无固摩擦、无间隙、无滞回的差动气轴承丝杠。阐明了差动气轴承螺杆有8种可能的构成。设计并研制了一种由内螺杆、中螺杆和外螺杆组成的差动空气螺杆，可同时供排静风、限气阀和高空气刚度。2. 采用0.1 mm的空气螺母和陶瓷空气螺母的部分凹槽进行低振动高刚度堆焊。在非量纲刚度为0.29的情况下，得到了部分凹槽螺母的刚度。3. 对差动气螺杆的螺杆性能进行了评价，并对3.5 nm小排量工况的双向输送进行了澄清。

A differential air bearing screw was newly developed that an accurate positioning having no solid friction, no backlash, and no hysteresis.1. It was clarified that the differential air bearing screw has 8 possible constitute of. A differential air screw that was made of an inner screw, a middle screw, and outer screw composition was designed and developed for both supplying and exhausting static air, air pressure restrictors and high air stiffness. 2. Low vibration and high stiffness surfacing were proposed using partial recesses on air nut and ceramic air nuts of 0.1 mm. The stiffness of the partial recess nuts was obtained for non-dimension stiffness 0.29. 3. The lead screw performance of the differential air screw was evaluated and both-way sending of small displacement operation 3.5 nm was clarified.