A Study on Improved Specification of an Absolute Displacement Sensor

提出了一种用于防振的绝对式位移传感器。通过使用科学研究助学金(C20560212)，表明该传感器作为反馈传感器是有效的。然后，我们希望将相同的传感器应用于半导体曝光设备，但检测带宽和灵敏度受到限制。为了克服这些问题，采用了一种通过增加线圈匝数来提高灵敏度的方法。其次，进行了灵敏度标定和实际控制试验。最后，利用调谐质量阻尼器对共振进行了抑制。因此，TMD对共振的抑制作用最强。此外，我们还从振型、加载点、TMD的构成等方面对TMD进行了加载试验。TMD在多个点上极大地抑制了共振。此外，还验证了绝对位移传感器速度信号反馈下的高频动力学效应及其抑制作用。

An absolute displacement sensor has been proposed for anti-vibration. By using Grant-in-Aid for Scientific Research (C20560212), it has been shown that this sensor is effective as a feedback sensor. Then, we would like to apply the same sensor to semiconductor exposure apparatuses, however detection bandwidth and sensitivity were limited. To overcome these issues, a high sensitive method by increasing the number of coil turns was carried out. Next, sensitivity calibration and practical control tests were conducted. Finally, we conducted to suppress the resonances by Tuned Mass Damper. As a result, the resonances can be most suppressed by TMD. Moreover, we tried loading TMD in consideration of vibration modes, loading point, and constitution of TMD. The resonances were drastically suppressed by TMD on multiple points. In addition, we confirmed effects of high frequency dynamics and its suppression under the feedback of the absolute displacement sensor's velocity signal.